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We describe a thin-filmsuperconductingNbmicrowaveresonator, tunable to within 0.3 ppm of the hyperfine splitting of 87Rb at f Rb = 6.834683 GHz. We coarsely tuned the resonator using electron-beam lithography, decreasing the resonance frequency from 6.8637 GHz to 6.8278 GHz. For in situ fine tuning at 15 mK, the resonator inductance was varied using a piezoelectric stage to move a superconducting pin above the resonator. We found a maximum frequency shift of about 8.7 kHz per 60-nm piezoelectric step and a tuning range of 18 MHz.


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