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Design of narrow band photonic filter with compact MEMS for tunable resonant wavelength ranging 100 nm
1.J. S. Foresi, P. R. Villeneuve, J. Ferrera, E. R. Thoen, G. Steinmeyer, S. Fan, J. D. Joannopoulos, L. C. Kimerling, H. I. Smith, and E. P. Ippen, Nature 390, 143 (1997).
11.A. Taflove and Susan C. Hagness, Computational Electrodynamics: The Finite-Difference Time-Domain Method (Artech: Norwood, MA, 2000).
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A prototype of planar siliconphotonicstructure is designed and simulated to provide narrow resonant line-width (∼2 nm) in a wide photonic band gap (∼210 nm) with broad tunable resonant wavelength range (∼100 nm) around the optical communication wavelength 1550 nm. This prototype is based on the combination of two modified basic photonicstructures, i.e. a split tapered photonic crystal micro-cavity embedded in a photonic wire waveguide, and a slot waveguide with narrowed slabs. This prototype is then further integrated with a MEMS(microelectromechanical systems) based electrostatic comb actuator to achieve “coarse tune” and “fine tune” at the same time for wide range and narrow-band filtering and modulating. It also provides a wide range tunability to achieve the designed resonance even fabrication imperfection occurs.
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