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Laser micro-fabrication of concave, low-roughness features in silica
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1.
1. F. Laguarta, N. Lupon, and J. Armengol, Appl. Opt. 33, 6508 (1994).
http://dx.doi.org/10.1364/AO.33.006508
2.
2. K. M. Nowak, H. J. Baker, and D. R. Hall, Appl. Opt. 45, 162 (2006).
http://dx.doi.org/10.1364/AO.45.000162
3.
3. U. C. Paek and A. L. Waver, Appl. Opt. 14, 294 (1975).
http://dx.doi.org/10.1364/AO.14.000294
4.
4. M. Wakaki, Y. Komachi, and G. Kanai, Appl. Opt. 37, 627 (1998).
http://dx.doi.org/10.1364/AO.37.000627
5.
5. D. W. Vernooy, A. Furusawa, N. P. Georgiades, V. S. Ilchenko, and H. J. Kimble, Phys. Rev. A 57, R2293 (1998).
http://dx.doi.org/10.1103/PhysRevA.57.R2293
6.
6. D. K. Armani, T. J. Kippenberg, S. M. Spillane, and K. J. Vahala, Nature 421, 925 (2003).
http://dx.doi.org/10.1038/nature01371
7.
7. M. Feit and A. Rubenchik, in Proc. SPIE (2003), vol. 4932, p. 91.
8.
8. E. Mendez, K. M. Nowak, H. J. Baker, F. J. Villarreal, and D. R. Hall, Appl. Opt. 45, 5358 (2006).
http://dx.doi.org/10.1364/AO.45.005358
9.
9. G. A. Markillie, H. J. Baker, F. J. Villarreal, and D. R. Hall, Appl. Opt. 41, 5660 (2002).
http://dx.doi.org/10.1364/AO.41.005660
10.
10. Y. Colombe, T. Steinmetz, G. Dubois, F. Linke, D. Hunger, and J. Reichel, Nature 450, 272 (2007).
http://dx.doi.org/10.1038/nature06331
11.
11. C. Toninelli, Y. Delley, T. Stöferle, A. Renn, S. Götzinger, and V. Sandoghdar, APL 97, 021107 (2010).
12.
12. R. J. Barbour, P. A. Dalgarno, A. Curran, K. M. Nowak, H. J. Baker, D. R. Hall, N. G. Stoltz, P. M. Petroff, and R. J. Warburton, J. Appl. Phys. (2011).
13.
13. D. Hunger, T. Steinmetz, Y. Colombe, C. Deutsch, T. W. Hänsch, and J. Reichel, New J. Phys. 12, 065038 (2010).
http://dx.doi.org/10.1088/1367-2630/12/6/065038
14.
14. A. Muller, E. B. Flagg, J. R. Lawall, and G. S. Solomon, Opt. Lett. 35, 2293 (2010).
http://dx.doi.org/10.1364/OL.35.002293
15.
15. M. von Allmen and A. Blatter, Laser-Beam interactions with materials, Springer Series in Materials Science Vol. 2 (Springer, Heidelberg, 1995).
16.
16. S. T. Yang, M. J. Matthews, S. Elhadj, V. G. Draggoo, and S. E. Bisson, J. Appl. Phys. 106, 103106 (2009).
http://dx.doi.org/10.1063/1.3259419
17.
17. J. M. Bennett, Meas. Sci. Technol. 3, 1119 (1992).
http://dx.doi.org/10.1088/0957-0233/3/12/001
18.
18. C. J. Hood, H. J. Kimble, and J. Ye, Phys. Rev. A 64, 033804 (2001).
http://dx.doi.org/10.1103/PhysRevA.64.033804
19.
19. J. Volz, R. Gehr, G. Dubois, J. Estève, and J. Reichel, Nature 475, 210 (2011).
http://dx.doi.org/10.1038/nature10225
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FIG. 1.

(a) Surface profile of a machined fiber measured by the optical profilometer. Beam parameters are P = 420 mW, τ p = 27 ms and w = 28 μm. (b) Cut through the center of the profile shown in (a) (red solid line) and its fit to a Gaussian (black dash-dotted line). (c) Central part of the same data (red solid line) along with a circle fitted to the center yielding R = 70.8 μm (black dash-dotted line). Also shown is the local radius of curvature as calculated from a high-order polynomial fit to the data (green dotted line). (d) Quantities used to characterize the profile. R designates the radius of curvature in the center of the structure. d is the structure diameter as defined in the text and t the depth of the structure.

Image of FIG. 2.

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FIG. 2.

(a) Central radius of curvature R as a function of pulse train duration τ p for various powers P. m fibers were used and the waist was w = 27 μm. (b) Measured structure depth t as a function of laser power P for w = 27 μm and three different pulse lengths.

Image of FIG. 3.

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FIG. 3.

Experimentally realized geometries: R as a function of t. Beam powers and waists: ■ 600 mW, 26 μm. □ 1.85 W, 73 μm. • 373 mW, 27 μm. ○ 0.9 W, 63 μm. ▲ 540 mW, 28 μm. △ 575 mW, 63 μm. Data for a given parameter set were taken by varying τ p ; τ p increases from left to right. Squares: bulk material, circles: m fiber, triangles: m fiber. Inset: The measured R agrees well with the value R g calculated from d and t. (Straight line: R = R g .)

Image of FIG. 4.

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FIG. 4.

(a) Surface profiles (measured with the optical profiler) for different values of τ p . Shown are cuts through the center of m fibers for P = 572 mW, w = 51 μm. The curves are vertically offset by 100 nm for readability. (b) Measured central depth and (c) measured diameter of the depression as a function of τ p for similar beam parameters on different targets: • m fibers. m fibers. ■ 2 mm thick fused silica plate. Solid lines: Fit to the described model, where κ is used as fitting parameter to the data in (b). We find κ = 2.05 W/mK for the 125 μm fibers, κ = 2.0 W/mK for the 200 μm fiber, and κ = 2.55 W/mK for the glass plate. The same parameters are used for the model curves in (c), yielding a reasonable agreement for the plate, but not for the fibers. Beam parameters: • 600 mW, 26 μm. ▲ 540 mW, 28 μm. ■ 600 mW, 26 μm.

Image of FIG. 5.

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FIG. 5.

(a) AFM measurement of a 2 × 2 μm2 area in the center of a laser machined area. Shown is the surface elevation after substracting a fitted polynomial. (b) The 2D PSD of a 5 × 5 μm2 AFM scan for the remaining height elevation.

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/content/aip/journal/adva/2/1/10.1063/1.3679721
2012-01-13
2014-04-18

Abstract

We describe a micro-fabrication method to create concave features with ultra-low roughness in silica, either on optical fibers or on flat substrates. The machining uses a single CO2 laser pulse train. Parameters are chosen such that evaporation removes material while a low-viscosity melt layer produces excellent surface quality. A surface roughness σ ∼ 0.2 nm is regularly obtained. The concave depressions are near-spherical close to the center with radii of curvature between 20 and 2000 μm. The method allows fabrication of low-scatter micro-optical devices such as mirror substrates for high-finesse cavities or negative lenses on fiber tips, extending the range of micro-optical components.

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Scitation: Laser micro-fabrication of concave, low-roughness features in silica
http://aip.metastore.ingenta.com/content/aip/journal/adva/2/1/10.1063/1.3679721
10.1063/1.3679721
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