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/content/aip/journal/adva/2/1/10.1063/1.3692072
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/content/aip/journal/adva/2/1/10.1063/1.3692072
2012-02-23
2016-09-28

Abstract

The paper presents the results of investigation the process of formation of the ordered microstructures of dislocations in the near-surface layer a single-crystal plate of silicon under the action of pulsed laser radiation with microstructured distribution intensity. It has been found that generation of the ordered one-dimensional microstructures of dislocations takes place. The period of these ordered microstructures is d≈3÷4 μm. A combination of one-dimensional structures of dislocations produces ordered two-dimensional structure of dislocations.

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