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The relationship between the first-order metal-insulator transition (MIT) and the structural phase transition (SPT) in VO2film is analyzed by dielectric function, optical conductivity, plasma energy, and electrical conductivity. The MIT and SPT temperatures in VO2films were approximately 68 and 75 °C, respectively, with an intermediate phase existing between 68 and 75 °C. The optical and electrical results indicate that the first-order MIT in VO2films is not driven by the SPT.


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