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Development of a versatile capacitive tactile sensor based on transparent flexible materials integrating an excellent sensitivity and a high resolution
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A versatile capacitive tactile sensor based on transparent flexible materials is developed in a simple and low-cost fabrication process. The sensor shows an excellent sensitivity (S=2.05 N-1), and is highly sensitive to the load as low as about 3 mN. Moreover, it exhibits a prominent resolution. The excellent device performance is attributed to the creative design of polydimethylsiloxane(PDMS)polymer layer, used as the structuralmaterial of the sensor, in which each sensing section acting as a sensor unit is a concave square with hemispheric micro-structured PDMS arrays. Meanwhile, other sections without any PDMS arrays serving as perfect natural wall-barriers can make each sensor unit separated effectively.
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