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Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers
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Figures

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FIG. 1.

Comparison between the expected spectral response and the experimental spectral response which have different FSRs in the wavelength domain. The inset shows a schematic illustration of FP cavity with planar distributed Bragg reflectors. The arrows point out to the effective length L eff and the physical length L phys .

Image of FIG. 2.

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FIG. 2.

(a) SEM photos of a sample based on three Bragg layers per mirror (whose cavity length L phys = 210 μm) overall view showing the full cavity and its L phys , the inset is a close view showing the details of a Bragg reflector. (b) Schematic representation of curved FP cavity illustrating the averaged lengths <L eff > and <L phys >. (c) Schematic illustration of the various reflection schemes taking place inside a curved FP cavity based on two silicon layers per mirror which explains the source of the different peaks that arise in the spatial interferograms as graphed in Fig. 4. Only some paths are traced for the shake of simplicity.

Image of FIG. 3.

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FIG. 3.

Experimental setup illustrating the PS-OLCI measurement setup. The low coherence Michelson interferometer is associated with a broadband source and is used to test the Device Under Test (DUT). The upper coherent Michelson refeflectometer is coupled to the reference arm of the previous interferometer and helps acquiring the sampled synchronous acquisition of the measurement signal to obtain finally, both the amplitude and the phase response of the DUT.

Image of FIG. 4.

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FIG. 4.

Spatial interferogram of FP cavity based on three Bragg layers per mirror shown in the inset of the figure. The envelope of the spatial interferogram is highlighted.

Image of FIG. 5.

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FIG. 5.

Envelope of the spatial interferograms of FP cavity based on two Bragg layers per mirror (Device 2).

Tables

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Table I.

Comparison between the physical lengths obtained using SEM and those obtained using the PS-OLCI. The measurements were carried-out on micromachined curved FP cavities based on two and three silicon layers per mirror.

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/content/aip/journal/adva/2/2/10.1063/1.4727741
2012-06-04
2014-04-18

Abstract

Herein, we highlight a behavior underlying the physics of Fabry-Pérot micro-cavities with distributed reflectors as there is a need to discriminate between effective and physical cavity lengths. Hence, Phase-Sensitive Optical Low Coherence Interferometry has been implemented to characterize micro-cavities with planar or curved reflectors. Beside the retrieved physical length, we obtain valuable information about the reflector thickness and number of layers. The accuracy of the technique has been estimated. Results suggest that this technique might be suitable to retrieve dimensional characteristics of any device constructed from multiple dielectric layers, whose thickness ranges from 2 micrometers up to hundreds of micrometers.

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Scitation: Analysis of micromachined Fabry-Pérot cavities using phase-sensitive optical low coherence interferometry: Insight on dimensional measurements of dielectric layers
http://aip.metastore.ingenta.com/content/aip/journal/adva/2/2/10.1063/1.4727741
10.1063/1.4727741
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