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1. Zhao Jian, A study on threshold acceleration switches based on bistable characteristic (Xidian University, 2008).
2. Joonwon Kim, Wenjiang Shen, Laurent Latorre, and Chang-Jin Kim, “A micromechanical switch with electrostatically driven liquid-metal droplet,” Sensors and Actuators A, 97–98, 672679 (2002).
3. Jonathan Simon, Scott Saffer, and Chang-Jin Kim, “A liquid-filled microrelay with a moving mercury microdrop,” Journal of Microelectromechanical systems 6, 208216 (1997).
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5. Lin Yi, Yang Tao, Liu Tingting, Chen Guangyan et al., “Analysis and simulation of Micro-fluidic inertial switch,” Key Engineering Materials 503, 348353 (2011).
6. A. Jalali and A. F. Najafi, “Numerical modeling of the solidification phase change in a pipe and evaluation of the effect of boundary conditions,” Journal of Thermal Science 19(5), 419424 (2010).
7. Prateep Basu, Dheeraj Agarwal, T. John Tharakan, and A. Salih, “Numerical studies on air-core vortex formation during draining of liquids from tanks,” International Journal of Fluid Mechanics Research 40(1), 2741 (2013).
8. Jian Guo Hu, You Song Sun, and Zheng Rong Zhang, “Numerical simulation and experimental validation of three-dimensional unsteady multi-phase flow in flushing process of toilets,” Applied Mechanics and Materials 444–445, 304311 (2013).
9. Lin Qiu, Run Ping Niu, Min Yan, and Jin Yang, “Simulation research of angle action on fold-type board in air-heating collector,” Advanced Materials Research 706–708, 15621565 (2013).
10. Prosenjit Sen and Chang-Jin Kim, “A fast liquid-metal droplet microswitch using EWOD-driving contact-line sliding,” Journal of microelectromechanical systems 18, 174185 (2009).

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The micro-fluidic inertial switch based on liquid metal utilizes the moving mercury droplet to close the switch under the action of acceleration, which is characterized by no moving parts, small contact resistance, long service life and large current. In addition to the requirement of response time, accuracy and reliability, the micro-fluidic inertial switch needs to overcome the impact of the ambient vibration. The influence of the ambient vibration on the performance of switch is investigated by loading pulse or sinusoidal interference signals in the X, Y and Z direction. The numerical results suggest that the performance of micro-fluidic inertial switch is greatly affected by impact interference signal in X sensitive direction as compared with low frequency harmonic signal. If the impact signal with high amplitude lasts only for a short time, the wrong operation might also occur. The interference signals in insensitive direction have a relatively small impact on the performance of switch, and the impact of interference signal can be reduced by reasonable structural design. Finally, anodic bonding, deep reactive ion etching (DRIE) and sputtering technique are adopted to fabricate the micro-fluidic inertial switch. The acceleration threshold of the prototype is tested. The experiment results agree with the numerical results, which indicate that the simulation method is valid.


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