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/content/aip/journal/adva/4/3/10.1063/1.4867341
1.
1. N. Yazdi, F. Ayazi, and K. Najafi, “Micromachined inertial sensors,” Proceedings of the IEEE 86, 16401659 (1998).
http://dx.doi.org/10.1109/5.704269
2.
2. C. Acar, A. R. Schofield, A. A. Trusov, L. E. Costlow, and A. M. Shkel, “Environmentally Robust MEMS Vibratory Gyroscopes for Automotive Applications,” IEEE Sensors Journal 9, 18951906 (2009).
http://dx.doi.org/10.1109/JSEN.2009.2026466
3.
3. L. Xie, X. Wu, S. Li, H. Wang, and P. Dong, “A novel quartz micro-structure based on shear stress detection and its gyroscopic effect,” Acta Physica Sinica 59, 68966901 (2010).
4.
4. J. Soderkvist, “Micromachined gyroscopes,” Sensors and Actuators A 43, 6571 (1994).
http://dx.doi.org/10.1016/0924-4247(93)00667-S
5.
5. X. Wu, L. Xie, J. Xing, P. Dong, H. Wang, and J. Su, “A Z-Axis quartz tuning fork micromachined gyroscope based on shear stress detection,” IEEE Sensors Journal 12, 12461252 (2012).
http://dx.doi.org/10.1109/JSEN.2011.2163626
6.
6. R. H. Dixon and J. Bouchaud, “Markets and applications for MEMS inertial sensors,” Proc. SPIE 6113, 0610613 (2006).
7.
7. L. Xie, X. Wu, S. Li, H. Wang, J. Su, and P. Dong, “A Z-axis quartz cross-fork micromachined gyroscope based on shear stress detection,” Sensors 10, 15731588 (2010).
http://dx.doi.org/10.3390/s100301573
8.
8. M. S. Weinberg and A. Kourepenis, “Error sources in in-plane silicon tuning-fork MEMS gyroscopes,” Journal of Microelectromechanical Systems 15, 479491 (2006).
http://dx.doi.org/10.1109/JMEMS.2006.876779
9.
9. A. A. Trusov, A. R. Schofield, and A. M. Shkel, “Performance Characterization of a New Temperature-Robust Gain-Bandwidth Improved MEMS Gyroscope Operated in Air,” Sensors and Actuators A 155, 1622 (2009).
http://dx.doi.org/10.1016/j.sna.2008.11.003
10.
10. A. Gaisser, Z. Gao, B. Zhou, R. Zhang, and Z. Chen, “Scale factor determination of micro-machined angular rate sensors without a turntable,” Tsinghua Science and Technology 11, 533537 (2006).
http://dx.doi.org/10.1016/S1007-0214(06)70230-9
11.
11. B. Choi, S. Y. Lee, T. Kim, and S. S. Baek, “Dynamic characteristics of vertically coupled structures and the design of a decoupled micro gyroscope,” Sensors. 9, 59525967 (2009).
http://dx.doi.org/10.3390/s91007970
12.
12. Y. Nonomura, M. Fujiyoshi, Y. Omura, K. Tsukada, M. Okuwa, T. Morikawa, N. Sugitani, S. Satou, N. Kurata, and S. Matsushige, “Quartz rate gyro sensor for automotive control,” Sensors and Actuators A 110, 136141 (2004).
http://dx.doi.org/10.1016/j.sna.2003.10.048
13.
13. H. Tamura, T. Takano, and Y. Tomikawa, “Triaxial quartz gyrosensor using a threefold rotatory symmetric form vibrator,” Japanese Journal of Applied Physics 44, 45044508 (2005).
http://dx.doi.org/10.1143/JJAP.44.4504
14.
14. L. Xie, X. Wu, S. Li, H. Wang, and Y. Tao, “Design and characterization of a novel Z-axis quartz cross-fork micromachined gyroscope,” Chinese Journal of Mechanical Engineering 24, 5057 (2011).
http://dx.doi.org/10.3901/CJME.2011.01.050
15.
15. J. Soderkvist, “Electric equivalent circuit for flexural vibrations in piezoelectric materials,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 37, 577586 (1990).
http://dx.doi.org/10.1109/58.63116
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/content/aip/journal/adva/4/3/10.1063/1.4867341
2014-02-28
2016-09-27

Abstract

The vibration characteristic analysis method for a quartz microgyroscope based on the admittance circle is reported in this paper. Admittance theory is introduced and the admittance circle principle is analysed to study the vibration characteristics of the quartz microgyroscope. The prototype gyroscope was fabricated by micro-electromechanical systems (MEMS) technology. The admittance and phase diagram of the work mode were obtained by vibration mode test systems. Then the admittance circle of the work mode was drawn, and the parameter identification of the transfer function between the voltage and current was completed to analyse the vibration characteristics. Therefore, the vibration characteristic analysis method based on the admittance circle can be used to build the transfer function of the quartz microgyroscope, which is helpful for the design of a high performance quartz microgyroscope.

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