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High resolution capacitance detection circuit for rotor micro-gyroscope
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/content/aip/journal/adva/4/3/10.1063/1.4869239
2014-03-19
2015-05-06

Abstract

Conventional methods for rotor position detection of micro-gyroscopes include common exciting electrodes (single frequency) and common sensing electrodes (frequency multiplex), but they have encountered some problems. So we present a high resolution and low noise pick-off circuit for micro-gyroscopes which utilizes the time multiplex method. The detecting circuit adopts a continuous-time current sensing circuit for capacitance measurement, and its noise analysis of the charge amplifier is introduced. The equivalent output noise power spectral density of phase-sensitive demodulation is 120 nV/Hz1/2. Tests revealed that the whole circuitry has a relative capacitance resolution of 1 × 10−8.

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Scitation: High resolution capacitance detection circuit for rotor micro-gyroscope
http://aip.metastore.ingenta.com/content/aip/journal/adva/4/3/10.1063/1.4869239
10.1063/1.4869239
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