No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
High resolution capacitance detection circuit for rotor micro-gyroscope
1. N. Maluf and K. Williams, An Introduction to Microelectromechanical Systems Engineering (Artech House, London, 2004), p.31.
6. C. D. Ellis and B. M. Wilamowski, Proc. SPIE 6959, 59590Q (2008).
13. F. T. Han, Q. P. Wu, and J. X. Dong, J. Chin. Inert. Technol. 15, 72 (2007).
Article metrics loading...
Conventional methods for rotor position detection of micro-gyroscopes include common exciting electrodes (single frequency) and common sensing electrodes (frequency multiplex), but they have encountered some problems. So we present a high resolution and low noise pick-off circuit for micro-gyroscopes which utilizes the time multiplex method. The detecting circuit adopts a continuous-time current sensing circuit for capacitance measurement, and its noise analysis of the charge amplifier is introduced. The equivalent output noise power spectral density of phase-sensitive demodulation is 120 nV/Hz1/2. Tests revealed that the whole circuitry has a relative capacitance resolution of 1 × 10−8.
Full text loading...
Most read this month