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1. Ran Fang, Wengao Lu, and Guannan Wang, “A Low-noise High-voltage Interface Circuit for capacitive MEMS gyroscope,” Journal of Circuits Systems and Computers 22, 1340019 (2013).
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In this paper, the main factors which influence the noise ratio of gyroscope output signal were analysed, according to the MEMS gyro interface circuit technology. A working principle of a carrier in the gyroscope circuit was discussed, the process formula of the carrier amplitude and frequency in the interface circuit of modulation and demodulation was deduced, and the error components lead-in from carrier to gyroscope circuit was distinguished. Several commonly used carrier-generating circuit schemes were analysed and compared, and a carrier-generating program in the interface circuits of the micro-gyroscope was designed, which was applied in a MEMS gyro developed by our laboratory. The measurement results show that the amplitude stability and frequency stability is 1.3 ppm and 12 ppm, respectively, meeting the performance requirements of carrier generating in the MEMS gyro circuit.


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