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1. Y. F. Sun, S. B. Liu, F. L. Meng, J. Y. Liu, Z. Lin, L. T. Kong, and J. H. Liu, Sensors 12, 2610 (2012).
2. C. J. Martinez, B. Hockey, C. B. Montgomery, and S. Semancik, Langmuir 21, 7937 (2005).
3. F. Udrea, J. W. Gardner, D. Setiadi, J. A. Covington, T. Dogaru, C. C. Lu, and W. I. Mline, Sens. Actuators B 78, 180 (2001).
4. J. C. Belmonte, J. Puigcorbe, J. Arbiol, A. Vila, J. R. Morante, N. Sabate, I. Gracia, and C. Cane, Sens. Actuators B 114, 826 (2006).
5. G. Ferri, C. D. Carlo, V. Stornelli, A. D. Marcellis, A. Flammini, A. Depari, and N. Jand, Sens. Actuators B 143, 218 (2009).
6. M. Y. Afridi, J. S. Suehle, M. E. Zaghloul, D. W. Berning, A. R. Hefner, R. E. Cavivvhi, S. Semancik, C. B. Montgomery, and C. J. Taylor, IEEE Sensors J. 2, 644 (2002).
7. B. Guo, A. Bermak, P. C. H. Chan, and G. Z. Yan, Solid-state Electronics 51, 69 (2007).
8. J. W. Gardner, P. K. Guha, F. Udrea, and J. A. Covington, IEEE Sensors J. 10, 1833 (2010).
9. P. C. H. Chan, G. Z. Yan, L. Y. Sheng, R. K. Sharma, Z. A. Tang, J. K. O. Sin, I. M. Hsing, and Y. Y. Wang, Sens. Actuators B 82, 277 (2002).
10. M. Graf, D. Barrettino, M. Zimmermann, A. Hierlemann, H. Baltes, S. Hahn, N. Barsan, and U. Weimar, IEEE Sensors J. 4, 9 (2004).
11. J. S. Suchle, R. E. Cavicchi, M. Gaitan, and S. Semancik, IEEE Electron Devices Letters 14, 118 (1993).
12. L. Y. Sheng, Z. A. Tang, J. Wu, P. C. H. Chan, and J. K. O. Sin, Sens. Actuators B 49, 81 (1998).
13. R. E. Cavicchi, J. S. Suehle, K. G. Kreider, M. Gaitan, and P. Chaparala, Sens. Actuators B 33, 142 (1996).
14. M. Rydberg and U. Smith, IEEE Trans. Electron Devices 47,417 (2000).
15. J. Q. Wang and Z. A. Tang, Sens. Actuators A 176, 72 (2012).
16. S. Z. Ali, F. Udrea, W. I. Milne, S. Santra, and J. W. Gardner, J. Microelectromech. Syst. 17, 1408 (2008).
17. S. Santra, P. K. Guha, S. Z. Ali, P. Hiralal, H. E. Unalan, J. A. Covington, G. A. J. Amaratunga, W. I. Milne, J. W. Gardner, and F. Udrea, Sens. Actuators B 146, 559 (2010).
18. P. Ivanov, J. Laconte, J. P. Raskin, M. Stankova, E. Sotter, E. Llobet, X. Vilanova, D. Flandre, and X. Correig, Microsyst. Technol. 12, 160 (2005).
19. J. Courbat, D. Briand, L. Yue, S. Raible, and N. F. D. Rooij, Sens. Actuators B 161, 862 (2011).
20. G. Z. Yan, P. C. H. Chan, I. M. Hsing, R. K. Sharma, J. K. O. Sin, and Y. Y. Wang, Sens. Actuators A 89, 135 (2001).
21. J. J. Tsaur, C. H. Du, and C. K. Lee, Sens. Actuators A 92, 375 (2001).
22. F. T. Zhang, Z. A. Tang, J. Yu, and R. C. Jin, Sens. Actuators A 126, 300 (2006).

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A novel micro-hotplate (MHP) gas sensor is designed and fabricated with a standard CMOS technology followed by post-CMOS processes. The tungsten plugging between the first and the second metal layer in the CMOS processes is designed as zigzag resistor heaters embedded in the membrane. In the post-CMOS processes, the membrane is released by front-side bulk silicon etching, and excellent adiabatic performance of the sensor is obtained. Pt/Ti electrode films are prepared on the MHP before the coating of the SnO film, which are promising to present better contact stability compared with Al electrodes. Measurements show that at room temperature in atmosphere, the device has a low power consumption of ∼19 mW and a rapid thermal response of 8 ms for heating up to 300 °C. The tungsten heater exhibits good high temperature stability with a slight fluctuation (<0.3%) in the resistance at an operation temperature of 300 °C under constant heating mode for 336 h, and a satisfactory temperature coefficient of resistance of about 1.9‰/°C.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd