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Simulation study of HEMT structures with HfO2
cap layer for mitigating inverse piezoelectric effect related device failures
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The Inverse Piezoelectric Effect (IPE) is thought to contribute to possible device failure of GaN
High Electron Mobility Transistors (HEMTs). Here we focus on a simulation study to probe the possible mitigation of the IPE by reducing the internal electric fields and related elastic energy through the use of high-k materials. Inclusion of a HfO2 “cap layer” above the AlGaN barrier particularly with a partial mesa structure is shown to have potential advantages. Simulations reveal even greater reductions in the internal electric fields by using “field plates” in concert with high-k oxides.
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