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/content/aip/journal/adva/5/1/10.1063/1.4905887
1.
1.S. E. Potts, H. B. Profijt, R. Roelofs, and W. M. M. Kessels, Chem. Vap. Dep. 19, 125133 (2013).
http://dx.doi.org/10.1002/cvde.201207033
2.
2.J.C. Kwak, Y.H. Lee, and B.H. Choi, Appl. Surf. Sci. 230(1-4), 249 (2004).
http://dx.doi.org/10.1016/j.apsusc.2004.02.033
3.
3.B. H. Lee, S. Cho, J.K. Hwang, S. H. Kim, and M. M. Sung, Thin Solid Films 518, 64326436 (2010).
http://dx.doi.org/10.1016/j.tsf.2010.03.059
4.
4.S.K. Kim, S. Hoffmann-Eifert, and R. Waser, Electrochemical and Solid State Letters 14(4), H146-H148 (2011).
http://dx.doi.org/10.1149/1.3534833
5.
5.A. J. M. Mackus, A. A. Bol, and W. M. M. Kessels, Nanoscale 6, 10941 (2014).
http://dx.doi.org/10.1039/C4NR01954G
6.
6.A. J. M. Mackus, N. F. W. Thissen, J. J. L. Mulders, P. H. F. Trompenaars, M. A. Verheijen, A. A. Bol, and W. M. M. Kessels, J. Phys. Chem. C 117, 10788 (2013).
http://dx.doi.org/10.1021/jp402260j
7.
7.M. M. Frank, Y. J. Chabal, M. L. Green, A. Delabie, B. Brijs, G. D. Wilk, M.-Y. Ho, E. B. O. da Rosa, I. J. R. Baumvol, and F. C. Stedile, Appl. Phys. Lett. 83, 740 (2003).
http://dx.doi.org/10.1063/1.1595719
8.
8.A. J. M. Mackus, J. J. L. Mulders, M. C. M. van de Sanden, and W. M. M. Kessels, J. Appl. Phys. 107, 116102 (2010).
http://dx.doi.org/10.1063/1.3431351
9.
9.A. J. M. Mackus, S. A. F. Dielissen, J. J. L. Mulders, and W. M. M. Kessels, Nanoscale 4, 4477 (2012).
http://dx.doi.org/10.1039/c2nr30664f
10.
10.M. Ackerman, “UV-solar radiation related to mesospheric processes,” in Mesospheric Models and Related Experiments, edited by G. Fiocco (D. Reidel Publishing Company, Dordrecht, 1971), pp. 149-159.
11.
11.A. Rahtu and M. Ritala, Applied Physics Letters 80, 521 (2002).
http://dx.doi.org/10.1063/1.1433904
12.
12.M.M. Mousa, C. J. Oldham, and G. N. Parsons, Langmuir 30, 3741-3748 (2014).
http://dx.doi.org/10.1021/la500796r
13.
13.M. D. Groner, F. H. Fabreguette, J. W. Elam, and S. M. George, Chem. Mater. 16, 639-645 (2004).
http://dx.doi.org/10.1021/cm0304546
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/content/aip/journal/adva/5/1/10.1063/1.4905887
2015-01-09
2016-09-29

Abstract

We report the photochemical atomic layer deposition of Al O thin films and the use of this process to achieve area-selective film deposition. A shuttered vacuum ultraviolet (VUV) light source is used to excite molecular oxygen and trimethyl aluminum to deposit films at 60°C. In-situ QCM and post-deposition ellipsometric measurements both show that the deposition rate is saturative as a function of irradiation time. Selective area deposition was achieved by projecting the VUV light through a metalized magnesium fluoride photolithographic mask and the selectivity of deposition on the illuminated and masked regions of the substrate is a logarithmic function of the UV exposure time. The Al O films exhibit dielectric constants of 8 – 10 at 1 MHz after forming gas annealing, similar to films deposited by conventional thermal ALD.

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