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In this paper, a dynamics equation of the micro cantilever is presented which includes Van der Waals force. Using the equation, the effects of the Van der Waals force on the natural frequency for the micro cantilever is investigated. Results show that Van der Waals force should be considered for small initial clearance between the micro cantilever and base plate, small cantilever thickness and large cantilever length. To illustrate the analysis, a micro Si cantilever is fabricated and a test of the natural frequencies is done which illustrates the calculative results in this paper.


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