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Large compression deformation causes micro-springs buckling and loss of load capacity. We analyzed the impact of structural parameters and boundary conditions for planar micro-springs, and obtained the change rules for the two factors that affect buckling. A formula for critical buckling deformation of micro-springs under compressive load was derived based on elastic thin plate theory. Results from this formula were compared with finite element analysis results but these did not always correlate. Therefore, finite element analysis is necessary for micro-spring buckling analysis. We studied the variation of micro-spring critical buckling deformation caused by four structural parameters using ANSYS software under two constraint conditions. The simulation results show that when an x-direction constraint is added, the critical buckling deformation increases by 32.3-297.9%. The critical buckling deformation decreases with increase in micro-spring arc radius or section width and increases with increase in micro-spring thickness or straight beam width. We conducted experiments to confirm the simulation results, and the experimental and simulation trends were found to agree. Buckling analysis of the micro-spring establishes a theoretical foundation for optimizing micro-spring structural parameters and constraint conditions to maximize the critical buckling load.


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