Skip to main content

News about Scitation

In December 2016 Scitation will launch with a new design, enhanced navigation and a much improved user experience.

To ensure a smooth transition, from today, we are temporarily stopping new account registration and single article purchases. If you already have an account you can continue to use the site as normal.

For help or more information please visit our FAQs.

banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
1.K. Maenaka, S. Loku, and N. Sawai, Sens. Actuators A, Phys. 121, 6 (2005).
2.J. W. Weigold, K. Najifi, and S. W. Pang, J Microelectromech. Syst. 10, 518 (2001).
3.S. Lee, G. Nam, and J. Chae, IEEE Trans. VLSI Syst. 13, 1167 (2005).
4.O. Oliaei, IEEE Trans. Circ. Sys. 50, 1198 (2003).
5.E. Dullni, W. Shang, and D. Gentsch, IEEE Trans. Dielect El In. 13, 65 (2006).
6.J. Chae, H. Kulah, and K. Najafi, J Microelectromech. Syst. 13, 628 (2004).
7.Junseok Chae, Haluk Kulah, and Khalil Najafi, J Microelectromech. Syst. 13, 235 (2005).
8.Hongwei Qu, Deyou Fang, and Huikai Xie, IEEE Sens. J 8, 1511 (2008).
9.Xiaofeng Zhou, Lufeng Che, and Bin Xiong, Sens. Actuators A, Phys. 179, 291 (2012).
10.Chih-Ming Sun, Ming-Han Tsai, Yu-Chia Liu, and Weileun Fang, IEEE Trans Electron Dev. 57, 1670 (2010).
11.Lasse Aaltonen, Pasi Rahikkala, and Mikko Saukoski, Int. J. Circ. Theor. Appl. 37, 333 (2009).
12.Bader Almutairi and Michael Kraft, Sens. Actuators A, Phys. 186, 169 (2012).
13.Mikail Yücetaş, Mika Pulkkinen, and Antti Kalanti, IEEE J. Sol.-State Circ. 47, 1721 (2012).
14.Yufeng Dong, Michael Kraft, and William Redman-White, J. Micromech. Microeng. 16, 54 (2006).
15.Mark Lemkin and Bernhard E. Boser, IEEE J. Sol.-State Circ. 34, 456 (1999).
16.Haluk Külah, Junseok Chae, and Navid Yazdi, IEEE J. Sol.-State Circ. 41, 352 (2006).

Data & Media loading...


Article metrics loading...



Micro-electromechanical System(MEMS) accelerometers are widely used in a number of inertial navigation systems and vibration detection system thanks to their small size, low cost and low power consumption. In order to improve their performance, the accelerometers have been designed to compensate the zero-bias caused by process variations. A new method of self-calibration sensitivity applies a self-test structure to simulate standard acceleration; depending on the standard and real-time values of the accelerometer’s output and by adjustment of the time division feedback, the scale factor of capacitive accelerometers can be flexibly adjusted to achieve sensitivity in self-calibrating MEMS accelerometers. Moreover, this research also uses the following: a PID feedback structure to improve the stability of the closed-loop system; a correlated double sampling (CDS) circuit to attenuate noise, which can eliminate zero drift caused by offset voltage of the pre-amplifier; a time division multiplexing electrostatic force feedback circuit to achieve the operation of a closed-loop micro-accelerometer. The structure can completely avoid electrostatic feedback coupling with a capacitance change detection circuit, which can also improve the bandwidth and stability of the accelerometer. By means of capacitance compensation array the zero-bias performance of accelerometers can be improved. The bias stability of the accelerometer can be reduced from 173mg to 31mg by testing.


Full text loading...


Access Key

  • FFree Content
  • OAOpen Access Content
  • SSubscribed Content
  • TFree Trial Content
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd