Skip to main content

News about Scitation

In December 2016 Scitation will launch with a new design, enhanced navigation and a much improved user experience.

To ensure a smooth transition, from today, we are temporarily stopping new account registration and single article purchases. If you already have an account you can continue to use the site as normal.

For help or more information please visit our FAQs.

banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
/content/aip/journal/adva/5/4/10.1063/1.4916587
1.
1.J. Soderkvist, “Micromachined gyroscopes,” Sensors and Actuators A 43, 6571 (1994).
http://dx.doi.org/10.1016/0924-4247(93)00667-S
2.
2.K. Maenaka, T. Fujita, Y. Konishi, and M. Maeda, “Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass,” Sensors and Actuators A: Physical 54, 568-573 (1996).
http://dx.doi.org/10.1016/S0924-4247(97)80016-7
3.
3.Andrei M. Shkel, Roberto Horowitz, Ashwin A. Seshia, Sungsu Park, and Roger T. Howe, “Dynamics and control of micromachined gyroscopes,” Proceedings of the American Control Conference 3, 21192124 (1999).
4.
4.Hiroshi Kawai, Ken-Ichi Atsuchi, Masaya Tamura, and Kuniki Ohwada, “High-resolution microgyroscope using vibratory motion adjustment technology,” Sensors and Actuators A: Physical 90, 153-159 (2001).
http://dx.doi.org/10.1016/S0924-4247(01)00460-5
5.
5.I. P. Prikhodko, S. A. Zotov, A. A. Trusov, and A. M. Shkel, “Sub-degree-per-hour silicon MEMS rate sensor with 1 million Q-Factor,” Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS’11 (2011), pp. 28092812.
6.
6.S. Nitzan, C. H. Ahn, T.-H Su, M. Li, E. J. Ng, S. Wang, Z. M. Yang, G. O’Brien, B. E. Boser, T. W. Kenny, and D. A. Horsley, “Epitaxially-encapsulated polysilicon disk resonator gyroscope,” Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (2013) pp. 625628.
7.
7.Ajit Sharma, Mohammad Faisal Zaman, Mark Zucher, and Farrokh Ayazi, “A 0.1˚/hr bias drift electronically matched tuning fork microgyroscope,” Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (2008) pp. 69.
8.
8.W. K. Sung, M. Dalal, and F. Ayazi, “A mode-matched 0.9MHz single proof-mass dual-axis gyroscope,” 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS’11 (2011), pp. 28212824.
9.
9.N. Hedenstierna, S. Habibi, S. M. Nilsen, T. Kvistery, and G. U. Jensen, “Bulk micromachined angular rate sensor based on the butterfly gyro structure,” Proceedings of the IEEE Micro Electro Mechanical Systems (2001) pp. 178181.
10.
10.Dingbang Xiao, Jianbin Su, Zhihua Chen, Zhanqiang Hou, Xinghua Wang, and Xuezhong Wu, “Improvement of mechanical performace for vibratory microgyroscope based on sense mode closed-loop control,” Journal of Micro/Nanolithography, MEMS, and MOEMS 12(2), 023001-023005 (2013).
http://dx.doi.org/10.1117/1.JMM.12.2.023001
11.
11.Dingbang Xiao, Xinghua Wang, Zelong Zhou, Xuezhong Wu, Zhihua Chen, and Zhanqiang Hou, “A novel fabrication method based on an after thermal oxidation process for the realization of silicon-beams with normative polygon cross sections shapes,” Microsyst Technol 19, 1081-1086 (2013).
http://dx.doi.org/10.1007/s00542-012-1704-9
http://aip.metastore.ingenta.com/content/aip/journal/adva/5/4/10.1063/1.4916587
Loading
/content/aip/journal/adva/5/4/10.1063/1.4916587
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/journal/adva/5/4/10.1063/1.4916587
2015-03-26
2016-12-09

Abstract

A new approach to improve the performance of a butterfly gyroscope is developed. The methodology provides a simple way to improve the gyroscope’s sensitivity and stability, by reducing the resonant frequency mismatch between the drive and sense modes. This method was verified by simulations and theoretical analysis. The size of the hexagonal section oblique beam is the major factor that influences the resonant frequency mismatch. A prototype, which has the appropriately sized oblique beam, was fabricated using precise, time-controlled multilayer pre-buried masks. The performance of this prototype was compared with a non-tuned gyroscope. The scale factor of the prototype reaches 30.13 mV/ ˚/s, which is 15 times larger than that obtained from the non-tuned gyroscope. The bias stability of the prototype is 0.8 ˚/h, which is better than the 5.2 ˚/h of the non-tuned devices.

Loading

Full text loading...

/deliver/fulltext/aip/journal/adva/5/4/1.4916587.html;jsessionid=h0CkwO6uNfk_nySzA3mAADUJ.x-aip-live-03?itemId=/content/aip/journal/adva/5/4/10.1063/1.4916587&mimeType=html&fmt=ahah&containerItemId=content/aip/journal/adva
true
true

Access Key

  • FFree Content
  • OAOpen Access Content
  • SSubscribed Content
  • TFree Trial Content
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
/content/realmedia?fmt=ahah&adPositionList=
&advertTargetUrl=//oascentral.aip.org/RealMedia/ads/&sitePageValue=aipadvances.aip.org/5/4/10.1063/1.4916587&pageURL=http://scitation.aip.org/content/aip/journal/adva/5/4/10.1063/1.4916587'
Right1,Right2,Right3,