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/content/aip/journal/adva/5/4/10.1063/1.4918684
2015-04-16
2016-10-01

Abstract

High carbon-rich boroncarbonitride thin films have been grown by pulsed laser deposition (PLD) technique with using BN-C dual-targets. Fourier-transform infrared (FTIR) spectroscopy results presented B-N, B-C and C-N bonds, indicating the as-deposited thin films were new ternary compounds. B-N, B-C and C-N bonding structures were also detected by X-ray photoelectron spectroscopy (XPS), and carbon content fell into a large range of 45.8 to 85.9%. The films exhibited good thermalstability in vacuum, whereas were oxidized at 600 oC in air.

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