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As an alternative to traditional cantilever beam structures and their evolutions, a flexible beam based, interdigital structure, vibration energy harvester has been presented and investigated. The proposed interdigital-shaped oscillator consists of a rectangular flexible frame and series of cantilever beams interdigitally bonded to it. In order to achieve low frequency and wide-bandwidth harvesting, Young’s modulus of materials, frame size and the amount of the cantilevers have been studied systematically. The measured frequency responses of the designed device (PDMS frame, quintuple piezoelectric cantilever beams) show a 460% increase in bandwidth below 80Hz. When excited at an acceleration of 1.0 g, the energy harvester achieves to a maximum open-circuit voltage of 65V, and the maximum output power 4.5 mW.


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