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Superconducting nanowire single-photon detectors at a wavelength of 940 nm
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17. The refractive indices used in our simulation were n_Ta2O5 = 2.26, n_SiO2 = 1.47, n_NbN = 4.81-4.77*i, n_Si = 3.46, measured by using an ellipsometry at 940 nm.
18. We fixed the optical input power and fed it into a variable attenuator (Agilent 81570A, operating at 1200 nm). We measured the output power as function of attenuation with a calibrated high-sensitivity InGaAs power sensor (Agilent 81634B) at 940 nm. The output power showed a good linearity (slope ∼ -1.08, standard error ∼ 1.4×10−4) with attenuation in dB.
20. For Φ = 18, 15, 10, and 5 μm, Lk = 1288, 800, 345, 82 nH, respectively, measured by using a network analyzer.
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We develop single-photon detectors comprising single-mode fiber-coupled superconducting nanowires, with high system detection efficiencies at a wavelength of 940 nm. The detector comprises a 6.5-nm-thick, 110-nm-wide NbN nanowire meander fabricated onto a Si substrate with a distributed Bragg reflector for enhancing the optical absorptance. We demonstrate that, via the design of a low filling factor (1/3) and active area (Φ = 10 μm), the system reaches a detection efficiency of ∼60% with a dark count rate of 10 Hz, a recovery time <12 ns, and a timing jitter of ∼50 ps.
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