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1.A. Ohtomo and H. Hwang, Nature 427, 423 (2004).
2.N. C. Bristowe, P. Ghosez, P. B. Littlewood, and E. Artacho, J. Phys. Cond. Matt. 26, 143201 (2014).
3.N. Nakagawa, H. Y. Hwang, and D. A. Muller, Nature Materials 5, 204 (2006).
4.S. Thiel, G. Hammert, A. Schmehl, C. W. Schneider, and J. Mannhart, Science 313, 1942 (2006).
5.A. Kalabukhov, R. Gunnarsson, J. Borjessen, E. Olsson, T. Claeson, and D. Winkler, Phys. Rev. B 75, 121404(R) (2007).
6.A. Brinkman, M. Huijben, M. v. Zalk, J. Huijben, U. Zeitler, J. C. Maan, G. v. d. Wiel, G. Rijnders, D. H. A. Blank, and H. Hilgenkamp, Nature Mat. 6, 493 (2007).
7.M. Huijben, A. Brinkman, G. Koster, G. Rijnders, H. Hilgenkamp, and D. H. A. Blank, Adv. Mat. 21, 1665 (2009).
8.A. Kalabukhov, Y. A. Boikov, I. T. Serenkov, V. I. Sakharov, J. Borjesson, N. Ljustine, E. Olsson, D. Winkler, and T. Claeson, Europhys. Lett. 93, 37001 (2011).
9.C. Cancellieri, N. Reyren, S. Gariglio, A. D. Caviglia, and J.-M. Triscone, Europhys. Lett. 91, 17004 (2010).
10.M. P. Warusawithana, A. A. Pawlicki, T. Heeg, D. G. Schlom, C. Richter, S. Paetel, J. MANNHART, M. Zheng, B. Mulcahy, J. N. Eckstein, W. Zander, and J. Schubert, Bulletin of the APS 55(2), (2010), abstract ID BAPS.2010.MAR.B37.1.
11.M. P. Warusawithana, C. Richter, J. A. Mundy, P. Roy, J. Ludwig, S. Paetel, T. Heeg, A. A. Pawlicki, L. F. Kourkoutis, M. Zheng, M. Lee, B. Mulcahy, W. Zander, Y. Zhu, J. Schubert, J. N. Eckstein, D. A. Muller, C. S. Hellberg, J. Mannhart, and D. G. Schlom, Nat. Commum. 4, 2351 (2013).
12.I. M. Dildar, D. Boltje, M. Hesselberth, J. Aarts, Q. Xu, H. W. Zandbergen, and S. Harkema, e-JSSNT 10, 1 (2012).
13.I. M. Dildar, D. B. Boltje, M. H. S. Hesselberth, J. Aarts, Q. Xu, H. W. Zandbergen, and S. Harkema, Appl. Phys. Lett. 102, 121601 (2013).
14.E. Breckenfeld, N. Bronn, J. Karthik, A. R. Damodaran, S. Lee, N. Mason, and L. W. Martin, Phys. Rev. Lett. 110, 196804 (2013).
15.T. C. Droubay, L. Qiao, T. C. Kaspar, M. H. Engelhard, V. Shutthanandan, and S. A. Chambers, Appl. Phys. Lett. 97, 124105 (2010).
16.S. Wicklein, A. Sambri, S. Amoruso, X. Wang, R. Bruzzese, A. Koehl, and R. Dittmann, Appl. Phys. Lett. 101, 131601 (2012).
17.H. K. Sato, C. Bell, Y. Hikita, and H. Y. Hwang, Appl. Phys. Lett. 102, 251602 (2013).
18.J. P. Podkaminer, T. Hernandez, M. Huang, S. Ryu, C. W. Bark, S. H. Baek, J. C. Frederick, T. H. Kim, K. H. Cho, J. Levy, M. S. Rzchowski, and C. B. Eom, Appl. Phys. Lett. 103, 071604 (2013).
19.X. X. Xi, G. Linjer, O. meyer, E. Nold, B. Obst, F. Radzel, R. Smithey, B. Strehlau, F. Weschenfelder, and J. Geerk, Zeitsch. Physik B 74, 13 (1989).
20.M. Kawasaki, K. Takahashi, T. Maeda, R. Tsuchiya, M. Shinohara, O. Ishiyama, T. Yonezawa, M. Yoshimoto, and H. Koinuma, Science 266, 1540 (1994).
21.G. Koster, B. L. Kropman, G. J. H. M. Rijnders, D. H. A. Blank, and H. Rogalla, Appl. Phys. Lett. 73, 2920 (1998).
22.L. Qiao, T. C. Droubay, T. Varga, M. E. Bowden, V. Shutthanandan, Z. Zhu, T. C. Kaspar, and S. A. Chambers, Phys. Rev. B 83, 085408 (2011).
23.Y. Z. Chen, D. V. Christensen, F. Trier, N. Pryds, A. Smith, and S. Linderoth, Appl. Surf. Science 258, 9242 (2012).
24.M. B. S. Hesselberth, S. J. van der Molen, and J. Aarts, Appl. Phys. Lett. 104, 051609 (2014).
25.C. S. Hellberg, Bulletin of the APS 56(1), (2011), abstract ID BAPS.2011.MAR.A34.5.

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Sputter deposition of oxide materials in a high-pressure oxygen atmosphere is a well-known technique to produce thin films of perovskite oxides in particular. Also interfaces can be fabricated, which we demonstrated recently by growing LaAlO on SrTiO substrates and showing that the interface showed the same high degree of epitaxy and atomic order as is made by pulsed laser deposition. However, the high pressure sputtering of oxides is not trivial and number of parameters are needed to be optimized for epitaxial growth. Here we elaborate on the earlier work to show that only a relatively small parameter window exists with respect to oxygen pressure, growth temperature, radiofrequency power supply and target to substrate distance. In particular the sensitivity to oxygen pressure makes it more difficult to vary the oxygen stoichiometry at the interface, yielding it insulating rather than conducting.


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