Skip to main content
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
/content/aip/journal/adva/5/7/10.1063/1.4927210
1.
1.T. Yager, M. J. Webb, H. Grennberg, R. Yakimova, S. Lara-Avila, and S. Kubatkin, Applied Physics Letters 106(6), 063503 (2015).
http://dx.doi.org/10.1063/1.4907947
2.
2.T. Kozawa, J. J. Santillan, and T. Itani, Japanese Journal of Applied Physics 53(10), 106501 (2014).
http://dx.doi.org/10.7567/JJAP.53.106501
3.
3.M. Saito, K. Ugajin, K. Yagawa, M. Suenaga, and Y. Kobayashi, Journal of Photopolymer Science and Technology 27(4), 511-516 (2014).
http://dx.doi.org/10.2494/photopolymer.27.511
4.
4.H. Liu, Y. Yao, Y. Wang, and W. Wu, Journal of Vacuum Science & Technology B 32(6), 06FE04 (2014).
http://dx.doi.org/10.1116/1.4901416
5.
5.S. B. Subramanyam, G. Azimi, and K. K. Varanasi, Advanced Materials Interfaces 1(2), (2014).
http://dx.doi.org/10.1002/admi.201300068
6.
6.G. T. Ayenew, A. Fischer, C.-H. Chan, C.-C. Chen, M. Chakaroun, J. Solard, L.-H. Peng, and A. Boudrioua, Optics express 22(106), A1619-A1633 (2014).
http://dx.doi.org/10.1364/OE.22.0A1619
7.
7.M. Tchernycheva, P. Lavenus, H. Zhang, A. V. Babichev, G. Jacopin, M. Shahmohammadi, F. H. Julien, R. Ciechonski, G. Vescovi, and O. Kryliouk, Nano letters 14(5), 2456-2465 (2014).
http://dx.doi.org/10.1021/nl5001295
8.
8.B. Liao, A. G. Aberle, T. Mueller, L. K. Verma, A. J. Danner, H. Yang, and C. S. Bhatia, Energy Procedia 15, 91-96 (2012).
http://dx.doi.org/10.1016/j.egypro.2012.02.011
9.
9.J. Liu, X. Zhang, G. Dong, Y. Liao, B. Wang, T. Zhang, and F. Yi, Solar Energy 105, 274-279 (2014).
http://dx.doi.org/10.1016/j.solener.2014.03.010
10.
10.A. Robinson, Nature nanotechnology 9(4), 251-252 (2014).
http://dx.doi.org/10.1038/nnano.2014.70
11.
11.E. Bat, J. Lee, U. Y. Lau, and H. D. Maynard, Nature communications 6 (2015).
http://dx.doi.org/10.1038/ncomms7654
12.
12.N. A. Cinel, S. Bütün, and E. Özbay, Optics express 20(3), 2587-2597 (2012).
http://dx.doi.org/10.1364/OE.20.002587
13.
13.S. i. Warisawa, K. Kuroda, S. Chen, R. Kometani, and S. Ishihara, Journal of Photopolymer Science and Technology 25(1), 37-42 (2012).
http://dx.doi.org/10.2494/photopolymer.25.37
14.
14.D. Forchheimer, G. Luo, L. Ye, and L. Montelius, Journal of Vacuum Science & Technology B 29(1), 011021 (2011).
http://dx.doi.org/10.1116/1.3527080
15.
15.M. Aktary, M. O. Jensen, K. L. Westra, M. J. Brett, and M. R. Freeman, Journal of Vacuum Science & Technology B 21(4), L5-L7 (2003).
http://dx.doi.org/10.1116/1.1596216
16.
16.T. Kozawa, S. Tagawa, T. Kai, and T. Shimokawa, Journal of Photopolymer Science and Technology 20(4), 577-583 (2007).
http://dx.doi.org/10.2494/photopolymer.20.577
17.
17.K. Okamoto, H. Yamamoto, T. Kozawa, R. Fujiyoshi, and K. Umegaki, Japanese Journal of Applied Physics 54(2), 026501 (2015).
http://dx.doi.org/10.7567/JJAP.54.026501
18.
18.J. Fujita, Y. Ohnishi, Y. Ochiai, and S. Matsui, Applied Physics Letters 68(9), 1297-1299 (1996).
http://dx.doi.org/10.1063/1.115958
19.
19.H. Kudo, D. Watanabe, T. Nishikubo, K. Maruyama, D. Shimizu, T. Kai, T. Shimokawa, and C. K. Ober, J. Mater. Chem. 18(30), 3588-3592 (2008).
http://dx.doi.org/10.1039/b805394d
20.
20.A. Robinson, R. Palmer, T. Tada, T. Kanayama, and J. Preece, Applied physics letters 72(11), 1302-1304 (1998).
http://dx.doi.org/10.1063/1.120978
21.
21.I. C. Mori, C. R. Arias-Barreiro, A. Koutsaftis, A. Ogo, T. Kawano, K. Yoshizuka, S. H. Inayat-Hussain, and I. Aoyama, Chemosphere 120, 299-304 (2015).
http://dx.doi.org/10.1016/j.chemosphere.2014.07.011
22.
22.Y. Wang, Z. Zhang, C. Jiang, and T. Xu, Industrial & Engineering Chemistry Research 52(51), 18356-18361 (2013).
http://dx.doi.org/10.1021/ie4023995
23.
23.C.-L. Wu, S.-B. Su, H.-Y. Lien, and H.-R. Guo, Burns 38(7), 1051-1057 (2012).
http://dx.doi.org/10.1016/j.burns.2012.02.027
24.
24.S.-H. Park, J. Park, K.-H. You, H.-C. Shin, and H.-O. Kim, Journal of occupational health 55(2), 120-124 (2012).
http://dx.doi.org/10.1539/joh.12-0143-CS
25.
25.C. Kannan, K. Muthuraja, and M. R. Devi, Journal of hazardous materials 244, 10-20 (2013).
http://dx.doi.org/10.1016/j.jhazmat.2012.11.016
26.
26.S. Takei, Applied Physics Express 3(2), 025202 (2010).
http://dx.doi.org/10.1143/APEX.3.025202
27.
27.S. Takei, Journal of Micro/Nanolithography, MEMS, and MOEMS 9(3), 033006 (2010).
http://dx.doi.org/10.1117/1.3475951
28.
28.S. Takei, Japanese Journal of Applied Physics 53(2S), 02BD15 (2014).
http://dx.doi.org/10.7567/JJAP.53.02BD15
29.
29.S. Takei, A. Oshima, A. Sekiguchi, N. Yanamori, M. Kashiwakura, T. Kozawa, and S. Tagawa, Applied Physics Express 4(10), 106502 (2011).
http://dx.doi.org/10.1143/APEX.4.106502
30.
30.S. Takei, A. Oshima, T. Wakabayashi, T. Kozawa, and S. Tagawa, Applied Physics Letters 101(3), 033106 (2012).
http://dx.doi.org/10.1063/1.4737639
31.
31.S. Takei, A. Oshima, T. Ichikawa, A. Sekiguchi, M. Kashiwakura, T. Kozawa, S. Tagawa, T. G. Oyama, S. Ito, and H. Miyasaka, Microelectronic Engineering 122, 70-76 (2014).
http://dx.doi.org/10.1016/j.mee.2014.02.026
32.
32.S. Takei, T. Shinjo, and Y. Sakaida, Japanese Journal of Applied Physics 46(11R), 7279 (2007).
http://dx.doi.org/10.1143/JJAP.46.7279
33.
33.C.-C. Wang and C.-C. Chen, Applied Catalysis A: General 293, 171-179 (2005).
http://dx.doi.org/10.1016/j.apcata.2005.07.007
34.
34.D. Alonso, M. Gimeno, R. Olayo, H. Vázquez-Torres, J. D. Sepúlveda-Sánchez, and K. Shirai, Carbohydrate Polymers 77(3), 536-543 (2009).
http://dx.doi.org/10.1016/j.carbpol.2009.01.027
35.
35.D. M. Tanenbaum, C. Lo, M. Isaacson, H. Craighead, M. Rooks, K. Lee, W. Huang, and T. Chang, Journal of Vacuum Science & Technology B 14(6), 3829-3833 (1996).
http://dx.doi.org/10.1116/1.588676
36.
36.H. Namatsu, M. Nagase, T. Yamaguchi, K. Yamazaki, and K. Kurihara, Journal of Vacuum Science & Technology B 16(6), 3315-3321 (1998).
http://dx.doi.org/10.1116/1.590375
37.
37.K. Tanaka, J. Nakamura, Y. Yamada, S. Kobayashi, and T. Itani, presented at the SPIE Advanced Lithography (2009), (unpublished).
38.
38.S. Takei, T. Shinjo, and Y. Sakaida, Japanese journal of applied physics 46(3R), 949 (2007).
http://dx.doi.org/10.1143/JJAP.46.949
39.
39.S. Takei, T. Ogawa, R. Deschner, K. Jen, T. Nihira, M. Hanabata, and C. G. Willson, Japanese Journal of Applied Physics 49(7), 075201 (2010).
http://dx.doi.org/10.1143/JJAP.49.075201
40.
40.S. Takei, T. Ogawa, R. Deschner, and C. G. Willson, Microelectronic Engineering 116, 44-50 (2014).
http://dx.doi.org/10.1016/j.mee.2013.10.010
http://aip.metastore.ingenta.com/content/aip/journal/adva/5/7/10.1063/1.4927210
Loading
/content/aip/journal/adva/5/7/10.1063/1.4927210
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/journal/adva/5/7/10.1063/1.4927210
2015-07-17
2016-10-01

Abstract

An electron beam (EB) lithography method using inedible cellulose-based resist material derived from woody biomass has been successfully developed. This method allows the use of pure water in the development process instead of the conventionally used tetramethylammonium hydroxide and anisole. The inedible cellulose-based biomass resist material, as an alternative to alpha-linked disaccharides in sugar derivatives that compete with food supplies, was developed by replacing the hydroxyl groups in the beta-linked disaccharides with EB-sensitive 2-methacryloyloxyethyl groups. A 75 nm line and space pattern at an exposure dose of 19 μC/cm2, a resist thickness uniformity of less than 0.4 nm on a 200 mm wafer, and low film thickness shrinkage under EB irradiation were achieved with this inedible cellulose-based biomass resist material using a water-based development process.

Loading

Full text loading...

/deliver/fulltext/aip/journal/adva/5/7/1.4927210.html;jsessionid=tY540e9qCpycB_KbSdvUwU5Z.x-aip-live-03?itemId=/content/aip/journal/adva/5/7/10.1063/1.4927210&mimeType=html&fmt=ahah&containerItemId=content/aip/journal/adva
true
true

Access Key

  • FFree Content
  • OAOpen Access Content
  • SSubscribed Content
  • TFree Trial Content
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
/content/realmedia?fmt=ahah&adPositionList=
&advertTargetUrl=//oascentral.aip.org/RealMedia/ads/&sitePageValue=aipadvances.aip.org/5/7/10.1063/1.4927210&pageURL=http://scitation.aip.org/content/aip/journal/adva/5/7/10.1063/1.4927210'
Right1,Right2,Right3,