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/content/aip/journal/adva/6/1/10.1063/1.4941074
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/content/aip/journal/adva/6/1/10.1063/1.4941074
2016-01-27
2016-12-07

Abstract

A controllable IC-compatible thin-filmfuse was developed that had Al/SiOthin-film stacks on a silicon substrate. The micro fuse has both a traditional mode and a controllable mode when applied as a fuse. It blows at 800 mA and 913.8 mV in the traditional mode. In the controllable mode, it blows within 400 ns at 10 V. It can be used for small electronic elements as well as electropyrotechnic initiators to improve the no-firing current.

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