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Lateral gas phase diffusion length of boron atoms over Si/B surfaces during CVD of pure boron layers
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The lateral gas phase diffusion length of boron atoms, LB, along silicon and boron surfaces during chemical vapor deposition(CVD) using diborane (B2H6) is reported. The value of LB is critical for reliable and uniform boron layer coverage. The presented information was obtained experimentally and confirmed analytically in the borondepositiontemperature range from 700 °C down to 400 °C. For this temperature range the local loading effect of the borondeposition is investigated on the micro scale. A LB = 2.2 mm was determined for borondeposition at 700 °C, while a LB of less than 1 mm was observed at temperatures lower than 500 °C.
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