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Displacement measurement of the compliant positioning stage based on a computer micro-vision method
1.Joonhyung Kwon, Jaewan Hong, Yong-Seok Kim, Dong-Youn Lee, Kyumin Lee, Sang-min Lee, and Sang-il Park, “Atomic force microscope with improved scan accuracy, scan speed, and optical vision,” Review of Scientific Instruments 74(10), 4378-4383 (2003).
2.Yi Zhang, Kok Kiong Tan, and Sunan Huang, “Vision-servo system for automated cell injection,” IEEE Transactions on Industrial Electronics 56(1), 231-238 (2009).
3.Hui Tang and Yangmin Li, “Development and active disturbance rejection control of a compliant micro-/nanopositioning piezostage with dual mode,” IEEE Transactions on Industrial Electronics 61(3), 1475-1492 (2014).
6.Qiliang Wang and Xianmin Zhang, “Fatigue reliability based optimal design of planar compliant micropositioning stages,” Review of Scientific Instruments 86(10), 105117 (2015).
8.Yangmin Li, Shunli Xiao, Longquan Xi, and Zhigang Wu, “Design, modeling, control and experiment for a 2-DOF compliant micro-motion stage,” Int. J. Precis. Eng. Manuf 15(4), 735-744 (2014).
9.Kee-Bong Choi, Jae Jong Lee, and Seiichi Hata, “A piezo-driven compliant stage with double mechanical amplification mechanisms arranged in parallel,” Sensors and Actuators A: Physical 161(1), 173-181 (2010).
10.Yangmin Li, Jiming Huang, and Hui Tang, “A compliant parallel XY micromotion stage with complete kinematic decoupling,” IEEE Transactions on Automation Science and Engineering 9(3), 538-553 (2012).
11.Kee-Bong Choi, Jae Jong Lee, and Seiichi Hata, “A piezo-driven compliant stage with double mechanical amplification mechanisms arranged in parallel,” Sensors and Actuators A: Physical 161(1), 173-181 (2010).
12.Jiangkun Shang et al., “A novel voice coil motor-driven compliant micropositioning stage based on flexure mechanism,” Review of Scientific Instruments 86(9), 095001 (2015).
14.Garry Berkovic and Ehud Shafir, “Optical methods for distance and displacement measurements,” Advances in Optics and Photonics 4(4), 441-471 (2012).
15.Hung-Lin Hsieh and Ssu-Wen Pan, “Development of a grating-based interferometer for six-degree-of-freedom displacement and angle measurements,” Optics express 23(3), 2451-2465 (2015).
16.Jong-Jae Lee and Masanobu Shinozuka, “Real-time displacement measurement of a flexible bridge using digital image processing techniques,” Experimental mechanics 46(1), 105-114 (2006).
17.Yuan Yuan, Jianyong Huang, Jing Fang, Fan Yuan, and Chunyang Xiong, “A self-adaptive sampling digital image correlation algorithm for accurate displacement measurement,” Optics and Lasers in Engineering 65, 57-63 (2015).
18.Asloob Ahmad Mudassar and Saira Butt, “Improved digital image correlation for in-plane displacement measurement,” Applied optics 53(5), 960-970 (2014).
19.Jong-Han Lee, Hoai-Nam Ho, Masanobu Shinozuka, and Jong-Jae Lee, “An advanced vision-based system for real-time displacement measurement of high-rise buildings,” Smart Materials and Structures 21(12), 125019 (2012).
20.Hao Yan and Bing Pan, “Three-dimensional displacement measurement based on the combination of digital holography and digital image correlation,” Optics letters 39(17), 5166-5169 (2014).
21.Misganu Debella-Gilo and Andreas Kääb, “Sub-pixel precision image matching for measuring surface displacements on mass movements using normalized cross-correlation,” Remote Sensing of Environment 115(1), 130-142 (2011).
23.Arie Nakhmani and Allen Tannenbaum, “A new distance measure based on generalized image normalized cross-correlation for robust video tracking and image recognition,” Pattern recognition letters 34(3), 315-321 (2013).
24.Shou-Der Wei and Shang-Hong Lai, “Fast template matching based on normalized cross correlation with adaptive multilevel winner update,” IEEE Transactions on Image Processing 17(11), 2227-2235 (2008).
25.J. P. Lewis, “Fast normalized cross-correlation,” Vision interface 10(1), 120-123 (1995).
26.Xinyun Zi, Shuai Geng, Shufan Zhao, and Fang Shu, “Measurement of short shaft power based on a digital speckle correlation method,” Measurement Science and Technology 26(4), 045001 (2015).
27.Peng Zhou and Kenneth E. Goodson, “Subpixel displacement and deformation gradient measurement using digital image/speckle correlation (DISC),” Optical Engineering 40(8), 1613-1620 (2001).
28.L. Jacobsson, C. Persson, and S. Melin, “Determination of displacements around fatigue cracks using image analysis of in-situ scanning electron microscope images,” Fatigue & Fracture of Engineering Materials & Structures 31(12), 1091-1100 (2008).
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We propose a practical computer micro-vision-based method for displacement measurements of the compliant positioning stage. The algorithm of the proposed method is based on a template matching approach composed of an integer-pixel search and a sub-pixel search. By combining with an optical microscopy, a high resolution CCDcamera and the proposed algorithm, an extremely high measuring precision is achieved. Various simulations and experiments are conducted. The simulation results demonstrate that the matching precision can reach to 0.01 pixel when the noise interference is low. A laser interferometermeasurement system (LIMS) is established for comparison. The experimental results indicate that the proposed method possesses the same performance as the LIMS but exhibits a greater flexibility and operability. The measuring precision can theoretically attain to 2.83 nm/pixel.
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