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20.Y Liu, PhD Thesis, Jilin University, 2012.

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In the field of controlleddrug delivery system, there are still many problems on those reported micro-valves, such as the small opening height, unsatisfactory particle tolerance and high cost. To solve the above problems, a novel normally-closed piezoelectric micro-valve is presented in this paper. The micro-valve was driven by circular unimorph piezoelectric vibrator and natural rubber membrane with high elasticity was used as the valve stopper. The small axial displacement of piezoelectric vibrator can be converted into a large stroke of valve stopper based on hydraulic amplification mechanism. The experiment indicates that maximum hydraulic amplification ratio is up to 14, and the cut-off pressure of the micro-valve is 39kPa in the case of no working voltage. The presented micro valve has a large flow control range (ranging from 0 to 8.75mL/min).


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