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See supplementary material at for information on the relationship between space group permutations of Pna21and Pmc21orthorhombic space groups, θ-2θ measurements and pole figure plots showing two-fold symmetry in ZnSnN2films deposited on LiGaO2 substrates.[Supplementary Material]

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We report on the crystal structure of epitaxial ZnSnN films synthesized via plasma-assisted vapor deposition on (111) yttria stabilized zirconia (YSZ) and (001) lithium gallate (LiGaO) substrates. X-ray diffraction measurements performed on ZnSnN films deposited on LiGaO substrates show evidence of single-crystal, phase-pure orthorhombic structure in the Pn2a symmetry [space group (33)], with lattice parameters in good agreement with theoretically predicted values. This Pn2a symmetry is imposed on the ZnSnN films by the LiGaO substrate, which also has orthorhombic symmetry. A structural change from the wurtzite phase to the orthorhombic phase in films grown at high substrate temperatures ∼550°C and low values of nitrogen flux ∼10−5 Torr is observed in ZnSnN films deposited on YSZ characterized by lattice contraction in the basal plane and a 5.7% expansion of the out-of-plane lattice parameter.


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