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High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization
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10.1063/1.3692172
/content/aip/journal/apl/100/11/10.1063/1.3692172
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/11/10.1063/1.3692172

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Unfolded view of the target with arrangement of Langmuir probe and local optical measurement. The actual light paths were in a plane perpendicular to the target.

Image of FIG. 2.
FIG. 2.

(Color online) Influence of peak current density and Ar pressure on the discharge: (a) and (e) Jd  = 0.75 A cm−2, PAr  = 0.17 Pa; (b) and (f) Jd  = 7.5 Acm−2, PAr  = 0.17 Pa; (c) and (g) Jd  = 7.5 A cm−2, PAr  = 1.0 Pa; and (d) and (h) Jd  = 7.5 A cm−2, PAr  = 1.7 Pa. Upper row: fast photography frames (false color), lower row: total light intensity vs azimuthal angle corresponding to a circle along the centre of the racetrack. Angle is counted clockwise.

Image of FIG. 3.
FIG. 3.

Signals from optical fibers and the floating potential measured by electrostatic probe at Jd  = 7.5 A cm−2, PAr  = 1.7 Pa. Corresponding features in both fibers are marked with a dotted line.

Tables

Generic image for table
Table I.

Influence of gas pressure at a peak current of 150 A (7.5 A cm−2) on the parameters of the rotating structures. The wavelength was calculated by dividing velocity by frequency.

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/content/aip/journal/apl/100/11/10.1063/1.3692172
2012-03-12
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/11/10.1063/1.3692172
10.1063/1.3692172
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