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High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization
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10.1063/1.3692172
/content/aip/journal/apl/100/11/10.1063/1.3692172
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/11/10.1063/1.3692172
/content/aip/journal/apl/100/11/10.1063/1.3692172
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/content/aip/journal/apl/100/11/10.1063/1.3692172
2012-03-12
2014-11-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/11/10.1063/1.3692172
10.1063/1.3692172
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