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Surface area enhancement of microcantilevers by femto-second laser irradiation
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Image of FIG. 1.
FIG. 1.

(a) Scanning electron microscope (SEM) image of a cantilever chip after irradiation. The inset shows the dimensions and axes used in the text. (b) Top view image of a cantilever. (c) Tilt image showing the sidewall of a cantilever. (d) High magnification image of an irradiated cantilever showing submicron structure on the surface.

Image of FIG. 2.
FIG. 2.

(a) Fundamental flexural resonances of a cantilever before (black) and after (red) irradiation measured both in vacuum and in air. The linear dimensions () are m3. (b) Thermal noise spectrum of the same cantilever. Resonance frequencies and have been subtracted from the frequency axis. The areas under the curves provide the stiffnesses and .

Image of FIG. 3.
FIG. 3.

Fluidic dissipation of the cantilevers as a function of the irradiation power. The data are presented as a ratio of the fluidic quality factors measured before and after irradiation. The effects of the frequency differences are de-convoluted by multiplying the with the imaginary component of the complex hydrodynamic function. Error bars show the associated single standard deviations.

Image of FIG. 4.
FIG. 4.

(a) Contact profiles of water droplets on the chip after silanization. The right side of the chip has been irradiated. (b) ESEM images of the chip with condensed water micro-droplets. (c) ESEM image of microdroplets on the microcantilever.


Generic image for table
Table I.

Parameters of different microcantilevers irradiated at different power levels. The parameters of the irradiated cantilevers are labeled with the subscript ‘i’ while the parameters of the untreated cantilevers are labeled with 0.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface area enhancement of microcantilevers by femto-second laser irradiation