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Dissipation mechanisms in thermomechanically driven silicon nitride nanostrings
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) Schematic of our measurement set-up. The silicon nitride nanostring is mounted in an optical-access vacuum chamber. (b)–(g) Cartoons showing the mode shapes of the first six harmonics of a nanostring. (h)–(i) Scanning electron micrographs of the 215 μm long silicon nitride nanostring, with scale bars of length 20 μm and 3 μm, respectively.

Image of FIG. 2.
FIG. 2.

Calibrated thermomechanical spectra of the first six harmonics of the 215 μm long nanostring (the device shown in Fig. 1). These are single sweeps and are post-processed by a sliding average over five points. The data are fit to an analytical expression for the power spectral density function (see Ref. 29).

Image of FIG. 3.
FIG. 3.

(a) Peak displacement and (b) Q from thermomechanical calibration of three devices, all 250 nm thick. Black circles are for a string 215 μm long and 2.1 μm wide, green squares for 102 μm long and 1.1 μm wide, red triangles for 74 μm long and 1.2 μm wide. The blue curve in (a) is a fit to Eq. (6).


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dissipation mechanisms in thermomechanically driven silicon nitride nanostrings