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Schematic of microscope and spectrometer setup showing how the fine size of the focal spot influences the spectroscopic signal.
Top: schematic of two sample orientations with respect to spectrometer entrance slit and direction of polarization. The trenches of the substrate are either oriented parallel or perpendicular to the spectrometer entrance slit. Bottom: AFM image of trenches (600 nm wide, 500 nm deep, distance between trenches: 2100 nm).
Spectral position and intensity of Raman LO phonon in GaAs when scanning either perpendicular (parallel to trenches) or parallel (perpendicular to trenches) with respect to the spectrometer entrance slit.
Effect of over and under focusing when scanning perpendicular to the spectrometer entrance slit. The spot size after defocusing has been double the size when compared to the spot size when focused.
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