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(Color online) (a) Testing setup of NEMS cantilever air flow sensor, (b) schematic drawing of reported NEMS cantilever air flow sensor, and (c) SEM photo of the fabricated device with inset showing a zoom in view for the 2 μm SiNWs after etching back all passivation layers.
(Color online) The plot of piezoresistance changes with respect to the air flow velocity increment up to 65 m/s. Inset (a) percentage changes of piezoresistance over air flow velocity increment up to 65 m/s, (b) piezoresistance variations at flow velocity of 0 m/s, and (c) piezoresistance variations at flow velocity of 65 m/s.
(Color online) The repeatability test of reported SiNWs based cantilever air flow sensor.
Comparisons between the reported SiNWs cantilever air flow sensor and recent research works.
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