1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor
Rent:
Rent this article for
USD
10.1063/1.3675878
/content/aip/journal/apl/100/2/10.1063/1.3675878
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/2/10.1063/1.3675878

Figures

Image of FIG. 1.
FIG. 1.

(Color online) (a) Testing setup of NEMS cantilever air flow sensor, (b) schematic drawing of reported NEMS cantilever air flow sensor, and (c) SEM photo of the fabricated device with inset showing a zoom in view for the 2 μm SiNWs after etching back all passivation layers.

Image of FIG. 2.
FIG. 2.

(Color online) The plot of piezoresistance changes with respect to the air flow velocity increment up to 65 m/s. Inset (a) percentage changes of piezoresistance over air flow velocity increment up to 65 m/s, (b) piezoresistance variations at flow velocity of 0 m/s, and (c) piezoresistance variations at flow velocity of 65 m/s.

Image of FIG. 3.
FIG. 3.

(Color online) The repeatability test of reported SiNWs based cantilever air flow sensor.

Tables

Generic image for table
Table I.

Comparisons between the reported SiNWs cantilever air flow sensor and recent research works.

Loading

Article metrics loading...

/content/aip/journal/apl/100/2/10.1063/1.3675878
2012-01-10
2014-04-18
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Piezoresistive silicon nanowire based nanoelectromechanical system cantilever air flow sensor
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/2/10.1063/1.3675878
10.1063/1.3675878
SEARCH_EXPAND_ITEM