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Nonlinear optical properties of low temperature annealed silicon-rich oxide and silicon-rich nitride materials for silicon photonics
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10.1063/1.3675882
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    Affiliations:
    1 Photonics Center, Boston University, 8 Saint Mary’s street, Boston, Massachusetts 02215-2421, USA and Division of Materials Science and Engineering, Boston University, 15 Saint Mary’s Street, Brookline, Massachusetts 02446, USA
    2 Department of Electrical and Computer Engineering, Boston University, 8 Saint Mary’s Street, Boston, Massachusetts 02215-2421, USA
    a) Present address: Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA.
    b) Author to whom correspondence should be addressed. Electronic mail: dalnegro@bu.edu.
    Appl. Phys. Lett. 100, 021109 (2012); http://dx.doi.org/10.1063/1.3675882
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/content/aip/journal/apl/100/2/10.1063/1.3675882
2012-01-10
2014-07-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nonlinear optical properties of low temperature annealed silicon-rich oxide and silicon-rich nitride materials for silicon photonics
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/2/10.1063/1.3675882
10.1063/1.3675882
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