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Nonlinear optical properties of low temperature annealed silicon-rich oxide and silicon-rich nitride materials for silicon photonics
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    1 Photonics Center, Boston University, 8 Saint Mary’s street, Boston, Massachusetts 02215-2421, USA and Division of Materials Science and Engineering, Boston University, 15 Saint Mary’s Street, Brookline, Massachusetts 02446, USA
    2 Department of Electrical and Computer Engineering, Boston University, 8 Saint Mary’s Street, Boston, Massachusetts 02215-2421, USA
    a) Present address: Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA.
    b) Author to whom correspondence should be addressed. Electronic mail: dalnegro@bu.edu.
    Appl. Phys. Lett. 100, 021109 (2012); http://dx.doi.org/10.1063/1.3675882
View: Figures


Image of FIG. 1.
FIG. 1.

(Color online) Typical Z-scan curves for SRN and SRO. Open aperture configuration (red diamonds and green stars, for SRN and SRO, respectively) and ratio of closed aperture to open aperture configuration (black hexagons and blue triangles, SRN and SRO, respectively). Continuous lines are fit to the standard theoretical model for Zscan.

Image of FIG. 2.
FIG. 2.

(Color online) (a) and (b) show nonlinear absorption β and nonlinear refractive index n2 as a function of Si excess for SRO, (c) and (d) for SRN. For both matrices, different annealing temperatures are reported. The superlinear dependence on Si excess is noticeable for all samples. Lines are guides to the eye.

Image of FIG. 3.
FIG. 3.

(Color online) Nonlinear parameters n2 and β in function of the normalized incident average power for SRN (a) and SRO (b).

Image of FIG. 4.
FIG. 4.

(Color online) Nonlinear Figure of Merit βλ/n2 as a function of the annealing temperature for different Si excess. Panel (a) shows the NFOM of SRN sample for Si excess for 27% (black stars), 18% (green hexagons). Panel (b) refers to SRO for 54% (blue diamonds) and 50% (red circles) Si excess, respectively.

Image of FIG. 5.
FIG. 5.

(Color online) Nonlinear refractive index n2 and absorption coefficient β as a function of the excitation wavelength for as-grown SRN with 27% Si excess. The inset displays the nonlinear figure of merit in the investigated wavelength range.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nonlinear optical properties of low temperature annealed silicon-rich oxide and silicon-rich nitride materials for silicon photonics