1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
High performance solution-deposited amorphous indium gallium zinc oxide thin film transistors by oxygen plasma treatment
Rent:
Rent this article for
USD
10.1063/1.4718022
/content/aip/journal/apl/100/20/10.1063/1.4718022
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/20/10.1063/1.4718022

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic device structure, (b) out-put characteristic curves measured at a constant VG of 5 V, and (c) transfer characteristic curves measured at a constant VD of 3 V for the TFTs with untreated and O2-plasma treated a-IGZO channel layers prepared at different annealing temperatures.

Image of FIG. 2.
FIG. 2.

Cross-sectional TEM images and Fourier transform of the (a) and (b) untreated and (c) and (d) plasma treated a-IGZO films prepared at 400 °C.

Image of FIG. 3.
FIG. 3.

FTIR spectra of untreated and 45s O2-plasma treated IGZO films before high temperature annealing.

Image of FIG. 4.
FIG. 4.

O 1s XPS spectra of the (a) untreated and (b) 45s O2-plasma treated a-IGZO films prepared at 400 °C. The solid circles and lines represent the experimental data and Gaussian peak fitting results, respectively.

Tables

Generic image for table
Table I.

Electrical parameters of a-IGZO TFTs prepared at different annealing temperatures.

Loading

Article metrics loading...

/content/aip/journal/apl/100/20/10.1063/1.4718022
2012-05-16
2014-04-18
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High performance solution-deposited amorphous indium gallium zinc oxide thin film transistors by oxygen plasma treatment
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/20/10.1063/1.4718022
10.1063/1.4718022
SEARCH_EXPAND_ITEM