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Piezoresistive strain sensing using carbon nanotube forests suspended by Parylene-C membranes
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10.1063/1.4721460
/content/aip/journal/apl/100/21/10.1063/1.4721460
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/21/10.1063/1.4721460
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Top and cross-sectional views of the piezoresistive strain gauge with CNT forest suspended from Parylene membrane.

Image of FIG. 2.
FIG. 2.

Optical image of a fabricated sample device (upper) with two scanning electron microscope (SEM) images of close-ups of the CNT forest (lower).

Image of FIG. 3.
FIG. 3.

Measured ΔR/R of the fabricated strain gauge with displacements up to 70 μm. The gauge-factor (GF) values shown are calculated under the assumption that the entire displacement was applied to the suspended membrane.

Image of FIG. 4.
FIG. 4.

(a) Measured ΔR/R of the fabricated strain gauge and force applied in response to bending of the forest-Parylene membrane, with an inset of a schematic diagram of the bending test set-up. (b) Measured ΔR/R vs. force showing a linear response of the device to the bending force.

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/content/aip/journal/apl/100/21/10.1063/1.4721460
2012-05-24
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Piezoresistive strain sensing using carbon nanotube forests suspended by Parylene-C membranes
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/21/10.1063/1.4721460
10.1063/1.4721460
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