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Top and cross-sectional views of the piezoresistive strain gauge with CNT forest suspended from Parylene membrane.
Optical image of a fabricated sample device (upper) with two scanning electron microscope (SEM) images of close-ups of the CNT forest (lower).
Measured ΔR/R of the fabricated strain gauge with displacements up to 70 μm. The gauge-factor (GF) values shown are calculated under the assumption that the entire displacement was applied to the suspended membrane.
(a) Measured ΔR/R of the fabricated strain gauge and force applied in response to bending of the forest-Parylene membrane, with an inset of a schematic diagram of the bending test set-up. (b) Measured ΔR/R vs. force showing a linear response of the device to the bending force.
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