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Nanohole pattern formation on germanium induced by focused ion beam and broad beam Ga+ irradiation
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10.1063/1.4721662
/content/aip/journal/apl/100/22/10.1063/1.4721662
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/22/10.1063/1.4721662
/content/aip/journal/apl/100/22/10.1063/1.4721662
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/content/aip/journal/apl/100/22/10.1063/1.4721662
2012-05-30
2014-10-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Nanohole pattern formation on germanium induced by focused ion beam and broad beam Ga+ irradiation
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/22/10.1063/1.4721662
10.1063/1.4721662
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