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Probing buried layers by photoelectron spectromicroscopy with hard x-ray excitation
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10.1063/1.4722940
/content/aip/journal/apl/100/22/10.1063/1.4722940
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/22/10.1063/1.4722940
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Figures

Image of FIG. 1.
FIG. 1.

Au/Si calibration sample imaged on the Au 3d5/2 photoemission line at a kinetic energy of 4294 eV (left). Line scan across a square edge and 16/84% profile fit (right).

Image of FIG. 2.
FIG. 2.

Comparison of imaging at low and high kinetic energies. (a) Image at low kinetic energy (threshold photoemission using mercury discharge lamp). The field of view is 40 µm. (b) Image of the same region of the sample with Sr 2p3/2 photoelectrons (kinetic energy 4560 eV) excited with hard x-rays of hν = 6500 eV.

Image of FIG. 3.
FIG. 3.

Selected area hard x-ray photoemission spectra from Au/STO. Inset top right: definition of regions of interest. Inset left: sample layer composition.

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/content/aip/journal/apl/100/22/10.1063/1.4722940
2012-05-30
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Probing buried layers by photoelectron spectromicroscopy with hard x-ray excitation
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/22/10.1063/1.4722940
10.1063/1.4722940
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