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(a) Schematic illustration of SiNH array. (b) Wavelength dependence of absorption spectra of SiNH arrays with different the lattice constants L and hole diameters D at fixed filling factor f = 0.5. (c) Schematic illustration of SiNF array. (d) Comparison of calculated absorption spectra of SiNF and optimized SiNH arrays. The filling fraction and the lattice constant are 0.5 and 500 nm, respectively.
(a) Ultimate efficiencies of SiNF and SiNH arrays at various lattice constants and filling fractions. (b) The effective refractive indices of SiNF and SiNH arrays as a function of the thickness at fixed lattice constant of 900 nm.
(a) Wavelength dependence of absorption spectra of SiNF arrays with different lattice constants at fixed filling fraction f = 0.78. (b) Absorption enhancement spectra of SiNF array generated by normalizing the absorption ANF(λ) of SiNF array to the absorption ANH(λ) of SiNH array.
Comparison of calculated absorption spectra of SiNF arrays with and without 72 nm thick Al2O3 AR film.
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