1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
f
Self-organization and self-limitation in high power impulse magnetron sputtering
Rent:
Rent this article for
Access full text Article
/content/aip/journal/apl/100/22/10.1063/1.4724205
1.
1. V. Kouznetsov, K. Macak, J. M. Schneider, U. Helmersson, and I. Petrov, Surf. Coat. Technol. 122, 290 (1999).
http://dx.doi.org/10.1016/S0257-8972(99)00292-3
2.
2. A. Ehiasarian, in Plasma Surface Engineering Research and Its Practical Applications, edited by R. Wei (Research Signpost, Kerala, India, 2008), p. 35.
3.
3. J. T. Gudmundsson, N. Brenning, D. Lundin, and U. Helmersson, J. Vac. Sci. Technol. A 30, 030801 (2012).
http://dx.doi.org/10.1116/1.3691832
4.
4. M. Wright and T. Beardow, J. Vac. Sci. Technol. A 4, 388 (1986).
http://dx.doi.org/10.1116/1.573888
5.
5. S. Mahieu, W. P. Leroy, D. Depla, S. Schreiber, and W. Möller, Appl. Phys. Lett. 93, 061501 (2008).
http://dx.doi.org/10.1063/1.2970037
6.
6. S. Kadlec and J. Musil, Vacuum 47, 307 (1996).
http://dx.doi.org/10.1016/0042-207X(96)80013-3
7.
7. A. Anders, J. Andersson, and A. Ehiasarian, J. Appl. Phys. 102, 113303 (2007).
http://dx.doi.org/10.1063/1.2817812
8.
8. A. Anders, J. Čapek, M. Hála, and L. Martinu, J. Phys. D: Appl. Phys. 45, 012003 (2012).
http://dx.doi.org/10.1088/0022-3727/45/1/012003
9.
9. A. Kozyrev, N. Sochugov, K. Oskomov, A. Zakharov, and A. Odivanova, Plasma Phys. Rep. 37, 621 (2011).
http://dx.doi.org/10.1134/S1063780X11060122
10.
10. A. Anders, P. Ni, and A. Rauch, J. Appl. Phys. 111, 053304 (2012).
http://dx.doi.org/10.1063/1.3692978
11.
11. A. P. Ehiasarian, A. Hecimovic, T. de los Arcos, R. New, V. Schulz-von der Gathen, M. Böke, and J. Winter, Appl. Phys. Lett. 100, 114101 (2012).
http://dx.doi.org/10.1063/1.3692172
12.
12. F. F. Chen, Plasma Physics and Controlled Fusion (Plenum, New York, 1984).
13.
13. A. Rauch, R. Mendelsberg, J. M. Sanders, and A. Anders, J. Appl. Phys. 111, 083302 (2012).
http://dx.doi.org/10.1063/1.3700242
14.
14. J. W. Bradley, S. Thompson, and Y. A. Gonzalvo, Plasma Sources Sci. Technol. 10, 490 (2001).
http://dx.doi.org/10.1088/0963-0252/10/3/314
15.
15. P. Sigmund, Phys. Rev. 184, 383 (1969).
http://dx.doi.org/10.1103/PhysRev.184.383
16.
16. M. W. Thompson, Philos. Mag. 18, 377 (1968).
http://dx.doi.org/10.1080/14786436808227358
17.
17. Y. Yamamura and H. Tawara, At. Data Nucl. Data Tables 62, 149 (1996).
http://dx.doi.org/10.1006/adnd.1996.0005
18.
18. D. J. Christie, J. Vac. Sci. Technol. A 23, 330 (2005).
http://dx.doi.org/10.1116/1.1865133
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/22/10.1063/1.4724205
Loading
/content/aip/journal/apl/100/22/10.1063/1.4724205
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/journal/apl/100/22/10.1063/1.4724205
2012-05-31
2014-11-27

Abstract

The plasma over the racetrack in high power impulse magnetron sputtering develops in traveling ionization zones. Power densities can locally reach 109 W/m2, which is much higher than usually reported. Ionization zones move because ions are “evacuated” by the electric field, exposing neutrals to magnetically confined, drifting electrons. Drifting secondary electrons amplify ionization of the sameionization zone where the primary ions came from, while sputtered and outgassing atoms are supplied to the following zone(s). Strong density gradients parallel to the target disrupt electron confinement: a negative feedback mechanism that stabilizes ionization runaway.

Loading

Full text loading...

/deliver/fulltext/aip/journal/apl/100/22/1.4724205.html;jsessionid=2139ji09hhkdi.x-aip-live-02?itemId=/content/aip/journal/apl/100/22/10.1063/1.4724205&mimeType=html&fmt=ahah&containerItemId=content/aip/journal/apl
true
true
This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Self-organization and self-limitation in high power impulse magnetron sputtering
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/22/10.1063/1.4724205
10.1063/1.4724205
SEARCH_EXPAND_ITEM