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An optofluidics biosensor consisted of high-finesse Fabry-Pérot resonator and micro-fluidic channel
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10.1063/1.4726188
/content/aip/journal/apl/100/23/10.1063/1.4726188
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/23/10.1063/1.4726188
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

The structure of the FPC biosensor and its measurement setup.

Image of FIG. 2.
FIG. 2.

The fabrication procedure of the FPC.

Image of FIG. 3.
FIG. 3.

SEM images of (a) the micro-channel and (b) the FPC resonator.

Image of FIG. 4.
FIG. 4.

Optical microscope images of the micro-channels fabricated by (a) DRIE etching on Si substrate, (b) wet etching on Si substrate, (c) wet etching on SOI substrate, and (d) optical microscope images of the untreated Si substrate (the surface roughness measured by Surface Profiler was shown as an inset).

Image of FIG. 5.
FIG. 5.

The transmission spectrum of FPC Biosensor with a RI difference of (a) 0.036 and (b) 0.0027.

Image of FIG. 6.
FIG. 6.

Relationship of the transmitted wavelength of the FPC and the RI of the fluid (the proportion of propanol in deionized water is 0%, 57%, 63%, 69%, respectively).

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/content/aip/journal/apl/100/23/10.1063/1.4726188
2012-06-06
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: An optofluidics biosensor consisted of high-finesse Fabry-Pérot resonator and micro-fluidic channel
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/23/10.1063/1.4726188
10.1063/1.4726188
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