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The structure of the FPC biosensor and its measurement setup.
The fabrication procedure of the FPC.
SEM images of (a) the micro-channel and (b) the FPC resonator.
Optical microscope images of the micro-channels fabricated by (a) DRIE etching on Si substrate, (b) wet etching on Si substrate, (c) wet etching on SOI substrate, and (d) optical microscope images of the untreated Si substrate (the surface roughness measured by Surface Profiler was shown as an inset).
The transmission spectrum of FPC Biosensor with a RI difference of (a) 0.036 and (b) 0.0027.
Relationship of the transmitted wavelength of the FPC and the RI of the fluid (the proportion of propanol in deionized water is 0%, 57%, 63%, 69%, respectively).
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