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Hard x-ray scanning microscopy with coherent radiation: Beyond the resolution of conventional x-ray microscopes
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10.1063/1.4729942
/content/aip/journal/apl/100/25/10.1063/1.4729942
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/25/10.1063/1.4729942
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Figures

Image of FIG. 1.
FIG. 1.

(a) Fluorescence map (Ta K α ) of an NTT-AT resolution test chart. The spatial resolution is given by the full width at half maximum (FWHM) beam size of the probe to (pixel size 40 nm). (b) Corresponding reconstructed ptychographic image showing a significantly improved spatial resolution (pixel size 3.84 nm).

Image of FIG. 2.
FIG. 2.

(a) Enlarged view of the ptychographic reconstruction of the resolution test pattern shown in Fig. 1(b) (quantitative phase map). (b) Line spread measured at different positions in (a). An error function is fitted to the line scans, and the FWHM spread is given for each. (c) Far-field diffraction pattern recorded at the position of the dot during the ptychographic scan, (d)similar diffraction pattern on the edge near line scan 1 (both on logarithmic scale). Line scan 3 and 4 are shifted by −0.2 rad and −0.4 rad for better presentation, respectively.

Image of FIG. 3.
FIG. 3.

Ptychographic images of a front-end processed and passivated microchip (cf. Ref. 15). (a) Ptychogram recorded with a detected fluence of , (b) ptychogram of another field of view (cf. Ref. 23, detected fluence: ). In (b), the gray scale is slightly shifted to enhance the contrast.

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/content/aip/journal/apl/100/25/10.1063/1.4729942
2012-06-21
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Hard x-ray scanning microscopy with coherent radiation: Beyond the resolution of conventional x-ray microscopes
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/25/10.1063/1.4729942
10.1063/1.4729942
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