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Fabrication of nanometer-size structures in metal thin films using femtosecond laser Bessel beams
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10.1063/1.3678030
/content/aip/journal/apl/100/3/10.1063/1.3678030
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/3/10.1063/1.3678030
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) (a) Calculated intensity profile of Bessel beams produced with axicon of 40° base angle. Intensity is normalized to the threshold value. (b) Change of ablation width by pulse intensity, relative to the ablation threshold.

Image of FIG. 2.
FIG. 2.

(Color online) Optical setup for nano-processing of metal thin films using Bessel beams.

Image of FIG. 3.
FIG. 3.

SEM images of ablated stripes in Au thin film with laser wavelength of (a) 1030 nm and (b) 515 nm.

Image of FIG. 4.
FIG. 4.

(Color online) The effect of pulse energy on stripe widths for the two laser wavelengths.

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/content/aip/journal/apl/100/3/10.1063/1.3678030
2012-01-18
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of nanometer-size structures in metal thin films using femtosecond laser Bessel beams
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/3/10.1063/1.3678030
10.1063/1.3678030
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