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Decreasing high ion energy during transition in pulsed inductively coupled plasmas
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10.1063/1.3679075
/content/aip/journal/apl/100/4/10.1063/1.3679075
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/4/10.1063/1.3679075
/content/aip/journal/apl/100/4/10.1063/1.3679075
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/content/aip/journal/apl/100/4/10.1063/1.3679075
2012-01-27
2014-07-10
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Scitation|Decreasing high ion energy during transition in pulsed inductively coupled plasmas
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/4/10.1063/1.3679075
10.1063/1.3679075
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