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Micro-imprinted prism substrate for self-aligned short channel organic transistors on a flexible substrate
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FIG. 1.

(Color online) Scheme of prism-OTFT fabrication process. (a) Aluminum (gate electrodes) layer deposition with a tilt angle. (b) Gate insulator and organic semiconductor deposition. (c) Gold (source-drain electrodes) layer deposition with a tilt angle.

Image of FIG. 2.

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FIG. 2.

(a) Cross-sectional SEM image of pentacene prism-OTFT and (b) close-up of the channel region.

Image of FIG. 3.

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FIG. 3.

(Color online) (a) Capacitance-Voltage charactistics between gate and source-drain electrode and (b) frequency characteristics of of pentacene OTFTs (W = 100 μm, L = 8 μm).

Image of FIG. 4.

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FIG. 4.

DC current-voltage characteristics of prism OTFTs. (a) Transfer characteristics of a p-channel (pentacene) OTFT (W = 100 μm, L = 8 μm). (b) Ts of a n-channel (C60) OTFT (W = 100 μm, L = 8 μm). DC characteristics of inverter circuit. (c) Voltage transfer curve (line with symbol) and noise margin window and (d) DC gain. All measurement was carried out inside a nitrogen glovebox.

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/content/aip/journal/apl/100/4/10.1063/1.3679119
2012-01-23
2014-04-23

Abstract

Using a simple micro-imprinting process on flexible substrates, we demonstrate fabrication of self-aligned short channel organic thin film transistors (OTFTs) with significantly reduced parasitic capacitance. The surface topology resulting from the imprinted prism-like structures enables accurate alignment of both the gate and source-drain electrodes. The parasitic overlap capacitance was reduced by 80%, which enables twice higher transition frequency (fT = 10.1 kHz) compared with conventional top-contact OTFT devices. The prism-OTFTs were applied to both p-type (pentacene) and n-type (C60) organic semiconductors to implement low voltage complementary inverters.

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Scitation: Micro-imprinted prism substrate for self-aligned short channel organic transistors on a flexible substrate
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/4/10.1063/1.3679119
10.1063/1.3679119
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