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SEM image of Ag films of different thicknesses produced by PEALD. (a) Film A, 9.7 nm; (b) film B, 31.2 nm; (c) film C, 43.4 nm; and (d) film D, 49 nm.
(Color) SERS intensity for BZT for films A-D for 515 nm (a) and 785 nm (b) laser light excitation.
(Color online) SEM images and comparison of the SERS signal of BZT of a PEALD Ag film (ALD) and e-beam evaporated Ag film (EB).
(Color) The three geometric air gap shapes: (a) linear gap, (b) cylindrical gap, and (c) “racetrack” gap, used to obtain the comsol plasmonic enhancement for the four PEALD Ag thin films and the resulting predicted enhancement as a function of incident wavelength for each Ag film. The letters A, B, C, and D correspond to the films shown in Figure 1. Film A consists of non-interacting cylinders, 10 nm thick; film B consists of closely spaced cylinders, 30 nm thick; film C consists of slots, racetracks, and cylinders, 40 nm thick; film D consists of fewer slots, racetracks, and cylinders, 50 nm thick.
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