1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Anomaly of film porosity dependence on deposition rate
Rent:
Rent this article for
USD
10.1063/1.3683542
/content/aip/journal/apl/100/6/10.1063/1.3683542
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/6/10.1063/1.3683542
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Scanning electron microscopy (SEM) images of Cu films deposited at (a) 1 nm/s and (b) 6 nm/s.

Image of FIG. 2.
FIG. 2.

Scanning electron microscopy (SEM) images of Cu films deposited at 0.1 nm/s, (a) without indium and (b) with 5 nm indium pre-deposition; with the inset being an SEM image of the indium nuclei on a area of 500 nm × 500 nm of SiO2.

Image of FIG. 3.
FIG. 3.

Scanning electron microscopy (SEM) images of Cu films deposited at (a) 1 nm/s and (b) 6 nm/s.

Image of FIG. 4.
FIG. 4.

(Color online) X-ray diffraction of the two films in Fig. 3.

Loading

Article metrics loading...

/content/aip/journal/apl/100/6/10.1063/1.3683542
2012-02-09
2014-04-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Anomaly of film porosity dependence on deposition rate
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/6/10.1063/1.3683542
10.1063/1.3683542
SEARCH_EXPAND_ITEM