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Low leakage current in metal-insulator-metal capacitors of structural Al2O3/TiO2/Al2O3 dielectrics
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10.1063/1.3687702
/content/aip/journal/apl/100/8/10.1063/1.3687702
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/8/10.1063/1.3687702
/content/aip/journal/apl/100/8/10.1063/1.3687702
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/content/aip/journal/apl/100/8/10.1063/1.3687702
2012-02-21
2014-10-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low leakage current in metal-insulator-metal capacitors of structural Al2O3/TiO2/Al2O3 dielectrics
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/8/10.1063/1.3687702
10.1063/1.3687702
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