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(Color online) C-V characteristics of MOS capacitors with (a) thermally grown oxides and (b) ALD oxides as a function of NO POA duration.
(Color online) Dit distributions as a function of energy level.
(Color online) Id–Vg characteristics and Vth of MOSFETs using (a) thermally grown oxide only, (b) thermally grown oxide with 120 min NO POA, and (c) ALD oxide with 180 min NO POA.
(Color online) μ FE of MOSFETs using thermally grown oxide only, thermally grown oxide with 120 min NO POA, and ALD oxide with 180 min NO POA.
A comparison of effective oxide charge (Qeff), Nit, VFB, and oxide thickness for all samples.
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