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Theoretical approach for plasma series resonance effect in geometrically symmetric dual radio frequency plasma
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10.1063/1.3690870
/content/aip/journal/apl/100/9/10.1063/1.3690870
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/9/10.1063/1.3690870
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic of the model used for nonlinear excitation of the series resonance in geometrically symmetric CCRF discharge.

Image of FIG. 2.
FIG. 2.

(Color online) Time evolution of the dual frequency applied rf voltage V(t) and plasma current I(t) for different phase difference of (a) φ = 0 and (b) φ = π / 4 and sheaths charge (c) φ = 0 and (d) φ = π/4 at 2 mTorr pressure.

Image of FIG. 3.
FIG. 3.

(a) (Color online) Time variation of difference in charge between the two sheaths for φ = 0 and π/4, variation of (b) time average sheaths charge, (c) difference in time average charge between the two sheaths, and (d) dc self bias with φ at 2 mTorr pressure.

Image of FIG. 4.
FIG. 4.

(Color online) Variation of Ohmic dissipation (ηOhm ), stochastic dissipation (ηstoch ), and total dissipation (ηtotal ) with (a) φ at 2 mTorr pressure and (b) pressure for two values of φ.

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/content/aip/journal/apl/100/9/10.1063/1.3690870
2012-02-29
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Theoretical approach for plasma series resonance effect in geometrically symmetric dual radio frequency plasma
http://aip.metastore.ingenta.com/content/aip/journal/apl/100/9/10.1063/1.3690870
10.1063/1.3690870
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