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Schematic of the model used for nonlinear excitation of the series resonance in geometrically symmetric CCRF discharge.
(Color online) Time evolution of the dual frequency applied rf voltage V(t) and plasma current I(t) for different phase difference of (a) φ = 0 and (b) φ = π / 4 and sheaths charge (c) φ = 0 and (d) φ = π/4 at 2 mTorr pressure.
(a) (Color online) Time variation of difference in charge between the two sheaths for φ = 0 and π/4, variation of (b) time average sheaths charge, (c) difference in time average charge between the two sheaths, and (d) dc self bias with φ at 2 mTorr pressure.
(Color online) Variation of Ohmic dissipation (ηOhm ), stochastic dissipation (ηstoch ), and total dissipation (ηtotal ) with (a) φ at 2 mTorr pressure and (b) pressure for two values of φ.
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